Carl Zeiss Smt Gmbh

Wayne Broderick

Thomas Anthony Case

Susan Candell

Allen Gu

Naomi Kotwal

Zheren Wu

Lorenz Lechner

A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.

Method for imaging a region of interest of a sample using a tomographic X-ray microscope, microscope, system and computer program

A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.

Sample holder, system and method

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Pleasanton, CA, United States of America

Wayne Broderick