Shin-etsu Handotai Co., Ltd.

Wataru Yajima

Tomohiko Ohta

Kiyotaka Takano

Kosei Sugawara

Hiroyuki Kamada

Hideaki Matsushima

Ichiro Onozawa

A single-crystal pulling apparatus includes: a pulling furnace having a heater and crucible; and a magnetic field generation device having superconducting coils, the device having four of the superconducting coils, two of the superconducting coils are in each of two regions divided by a cross section that includes an X axis being a direction of magnetic force lines at the central axis in the horizontal plane including all the coil axes of the four superconducting coils, and includes the pulling furnace central axis having line symmetry about the cross section, the four superconducting coils are all arranged so that the coil axes have an angle of more than −30° and less than 30° relative to a Y axis, the direction of the magnetic force lines thereof have line symmetry about the cross section, and in each of the regions, the two superconducting coils generate magnetic force lines in opposite directions.

Single-crystal pulling apparatus and single-crystal pulling method

A recharge tube stocker for storing and managing a recharge tube used for a single crystal pulling apparatus, including an inlet-outlet section for taking the recharge tube in the recharge tube stocker and taking the recharge tube out of the recharge tube stocker, a storage for storing the recharge tube, a raw-material charging device for charging the recharge tube with a raw material, a weighing device for weighing a weight of the raw material charged into the recharge tube, a transferring device for enabling a transfer of the recharge tube, being taken in through the inlet-outlet section, among the inlet-outlet section, the raw-material charging device, and the storage, and a managing device for collectively managing storage information on the recharge tube stored in the storage. This recharge tube stocker stores and manages tubes in a space saving manner without taking time for searching and without causing mix-up of recharge tubes.

Recharge tube stocker

An argon gas recovering and purifying method including: introducing waste argon gas containing nitrogen, oxygen, and carbon monoxide from silicon single crystal manufacturing apparatus into waste argon gas storage tank; removing solid matters in pretreatment facility which removes the solid matters in waste argon gas; converting oxygen into water and converting carbon monoxide into carbon dioxide by catalytic reaction; removing the water, the carbon dioxide, and the nitrogen to obtain recovered gas, in the argon gas recovering and purifying method and an argon gas recovering and purifying apparatus, the catalytic reaction is carried out with compression heat alone by arranging a catalyst in a two-stage compressor, and the water is removed by a dryer in advance and then the nitrogen and the carbon dioxide are adsorbed and removed in an ordinary-temperature adsorption tower at the step of obtaining the recovered gas.

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Nishigo-mura, Japan

Wataru Yajima