Audio-technica Corporation

Mitsubishi Electric Corporation

Hitachi-high-technologies Corporation

Hitachi High-tech Corporation

Mistubishi Electric Corporation

Wataru Suzuki

Nobuaki Miyake

Keisuke Hokazono

Hiroki Okazawa

Junya Uchida

Kenji Maeda

Shinya Kitayama

Takahiro Imamura

Hirohisa Enomoto

Takashi Nakajima

Satoshi Tomimatsu

Takashi Kato

Toshihide Agemura

Eiichi Hazaki

Tomohiko Takahashi

Ryoichi Ikeda

Kazuyoshi Takayama

Munekazu Koyanagi

Microphone

Receiver

Transmitter

Pop guard

Audio amplifier

Digital-analog converter

In a charged particle beam apparatus is provided with an optical image capturing apparatus having an angle different from that of a column, a sample may collide with other components when the sample is faced toward the optical image capturing apparatus. The charged particle beam apparatus includes a stage configured to place a sample thereon and to move the sample inside a sample chamber; a column configured to observe the sample by irradiating a charged particle beam on the sample; a first image capturing apparatus configured to observe a surface of the sample irradiated with the charged particle beam from an angle different from that of the column; and a control unit configured to, when observing the sample via the first image capturing apparatus, separate the sample from the column and to tilt the sample through the stage to face toward the first image capturing apparatus.

Charged particle beam apparatus

Provided is a charged particle beam device in which a support body is rigid enough to support a sample chamber while the vibration of the support body is reduced even under the action of a disturbance such as environmental sound, the degree of parallelism of the support body is maintained, and increase in weight of the support body is suppressed. The support body includes: a first member which supports a mounted object, and is supported by a vibration removing mount; second members which have a thickness different from that of the first member and arranged to overlap the first member; fixing members which fix the first member and the second members; and damping members which have rigidity lower than the fixing members and are deformed by a difference in variations between the first member and the second members.

Charged particle beam device

A heat exchanger includes plural heat transfer tubes and plural fins each having two opposing sides and plural opening ports on one side, of the two sides, for inserting and fastening the heat transfer tubes, and the heat exchanger is formed such that the plural heat transfer tubes and the plural fins cross each other, wherein at least two of the plural heat transfer tubes are fastened to the opening ports in a state of protruding from the one sides of the plural fins toward the outside of the plural fins.

Heat exchanger, air-conditioning apparatus using the same and method of manufacturing the same

Growing community of inventors

Tokyo, Japan

Wataru Suzuki