Kabushiki Kaisha Sg

Oki Electric Industry Co., Ltd.

Kabushiki Kaisha Toshiba

Toshiba Kikai Kabushiki Kaisha

Kabushiki Gaisha Sg

Wataru Shimizu

Akira Yamashita

Jitsuo Toda

Yasuhiro Yuasa

Kazuhiko Asakawa

Toshio Obara

Kimio Suzuki

Youshichi Kikuchi

Teruhumi Akama

Yuuji Matsuki

Yoshio Yoshinaga

A semiconductor device includes a semiconductor substrate which has a major surface and a MOS transistor which has a gate and first and second diffusion regions and which is formed on the major surface. The semiconductor device also includes a laminated structure of a SOG layer, wherein the laminated structure is composed of a base layer and a surface layer formed on the base layer and is formed over the MOS transistor and wherein the surface layer is denser than the base layer.

Semiconductor device and method of fabricating the same

Semiconductor device and methods of fabricating the same

The object is to provide a method capable of detecting the carrier profile with ease and without any limitation. The method for detecting the carrier profile includes a measurement step , the first analysis step , and the second analysis . In the measurement step , a p-n junction portion (FIG. 2) to which a bias voltage is applied, is irradiated with laser beams P (FIG. 2) capable of moving the irradiation position thereof, thereby detecting the relation between the irradiation position and the OBIC generated in the p-n junction portion. In the first analysis step , there is detected, based on the relation as detected in the measurement step , the relation between the expanded width of a depletion layer generated in the p-n junction portion and the bias voltage. In the second analysis step , there is detected, based on the relation as detected in the first analysis step , a carrier profile in the p-n junction portion.

Method for detecting carrier profile

A handy image data filing apparatus is disclosed, which is made up of a hand scanner as an image data reading device and an IC memory card as an image data storing medium. Image data on an object such as a name card is read by the hand scanner, and filed into the IC memory card. The read data is stored into the IC memory card, together with ID data for identifying the image data to be stored. The ID data is used for retrieving the image data later, and is entered from a keyboard. For retrieval, ID data corresponding to the desired image data is entered from the keyboard. The image data is specified by the ID data entered, and displayed by a liquid crystal display device.

Handy image data filing apparatus

A coil assembly including primary coils disposed at predetermined locations axially spaced from one another and secondary coils provided in association with these primary coils is fixed at one end of a fluid powered cyliner. A piston rod is slidably disposed through a space in the primary and secondary coils. Rings made of magnetic substance are provided on the piston rod with a predetermined axial interval therebetween. Each of the primary coils is excited with one of reference AC signals which are out of phase with one another and an output signal which is electrically phase-shifted in accordance with the position of the piston rod is obtained as a sum of output signals from the secondary coils. Piston rod position data is obtained by measuring the amount of the phase-shifting and is utilized for positioning control of the cylinder. The velocity and acceleration of the movement of the piston rod are detected on the basis of the detected position data and the amount of overrun is estimated in accordance with the detected velocity and acceleration to effect the most accurate positioning control. Each time the positioning is completed, the amount of overrun is corrected to improve the accuracy of a next positioning control.

Positioning control system for a fluid powered cylinder

The present device comprises a stator having a plurality of poles on which primary coils and at least one secondary coil is wound, and a rotor opposing the respective poles of the stator with gaps therebetween. A clock pulse generator is provided, and the respective primary coils are separately excited by reference AC signals which are out of phase with each other and are generated in response to a count of a counter counting a clock pulse signal from the clock pulse generator. The output of the secondary coil or coils provides an output signal resulting by phase shifting the reference AC signals in accordance with the rotational position of the rotor. The phase difference between the reference AC signal and the output signal is detected by obtaining a digital count representing the phase difference in synchronization with the counting by the counter to obtain detected digital phase difference data as an absolute rotational position data.

Digital output rotational position detection device

A rotational position, velocity and acceleration of an electrical motor are detected and an amount of overrun produced when the motor has stopped is estimated from the detected velocity and acceleration, and at least one of motor position detection data and a positioning target value is changed in accordance with the estimated amount of overrun. The position detection data and the positioning target value after the change are compared with each other and a command for stopping the motor is generated in accordance with a result of this comparison. A brake is applied to the motor in advance by the amount of the estimated overrun so that the motor is stopped at a desired target position after making overrun. Further, velocity setting signals are generated in accordance with desired acceleration and deceleration characteristics and the velocity control of the motor is effected in an open loop in response to the velocity setting signals. By the stop and velocity controls of an open loop system, positioning control of the motor of the open loop system can be accurately performed.

Positioning control device for an electric motor

A detection head unit comprises a stator and a rotor. The stator has four poles disposed circumferentially at an interval of 90.degree.. The poles have primary coils and secondary coils wound thereon. Two radially opposing poles constitute a pole pair. The primary coils wound on the poles constituting the pole pair are connected in series and in opposite phase with each other and one pole pair is excited by a sine wave signal and the other pole pair by a cosine wave signal. The rotor is of such a configuration, e.g. an eccentric rotor, as to change reluctance of the respective stator poles in accordance with a rotation angle and change reluctance in a differential manner between the two poles constituting the pole pair. An output signal resulting by phase shifting the sine wave signal applied to the primary coil in accordance with a rotation angle of the rotor is provided by a secondary coil. The rotation angle is detected by measuring phase difference between the reference signal and the output signal of the secondary coil. The rotation speed can be detected by detecting difference in frequency or period between the reference signal and the output signal. Further, acceleration in rotation can be detected by detecting an amount of change in the rotation speed. The detection device of a high resolution can be obtained by providing teeth of a certain pitch on the periphery of the rotor and teeth corresponding to the rotor teeth on the stator poles.

Rotation speed detection device having a rotation angle detector of

An apparatus and a process for detecting an absolute positional value relating to mechanical movement of a member to be measured from a reference point. The apparatus includes a detecting means with a plurality of detectors having periods which are different from one another. Each detector generates an electric signal having a period corresponding to the movement of the member. The signals are stored in a memory. Then, the absolute value of mechanical movement between one of the detectors and the member is specified by using two values. The first value is derived by multiplying the period of the signal corresponding to the one detector by an integer N. The second value is stored in the memory and corresponds to the one detector's partial movement which is less than one period thereof. The value of the integer is decided by using periods and stored values corresponding to other detectors.

Apparatus and method in which a plurality of detectors generating

This device comprises a first detector having a first rotor and a first stator for detecting an absolute rotational position within one cycle which corresponds to 1/N circumference, said rotor having teeth of N, and a second detector having a second rotor coupled with the first rotor and a second stator for detecting an absolute rotational position within one circumference within one cycle which corresponds to one circumference. The first and second stators are respectively provided with primary coils and secondary coils. The respective primary coils are excited by reference AC signals generated in response to a clock pulse signal from a clock pulse generator. Phase differences between first and second output signals produced from the secondary coils of the respective detectors and the reference AC signals are obtained by counting the clock pulse signal.

Multiple output rotational position detection device

The rotation of a motor is converted into a swinging movement of an ultrasonic transducer by a conversion mechanism. The relationship between a rotation angle .theta. of the motor and a swinging angle .eta. of the ultrasonic transducer can be expressed by .eta.=tan.sup.-1 (sin.theta.). The rotation of the motor is detected by a rotation detector of a reluctance type having an eccentric rotor. A signal having a nonlinear relationship with respect to an actual rotation angle .theta. of the motor, which can be expressed by the following equation, is supplied to a motor driver from the rotation detector:

Ultrasonic scanner

A plurality of detectors, i.e., encoders, are prepared each of which generates an output signal representing an absolute value below one period at a predetermined period with respect to a given rotational or linear displacement. A displacement associated with a rotational or linear displacement of an object of detection is provided to each detector and one period of each detector is established in such a manner that one such period corresponds to one of mutually different predetermined amounts of displacement of the object. As a result, the output signal of each detector changes at a rate which is different from one another with respect to the displacement of the object and a combination of values of the output signals of the respective detectors is sufficient to identify an absolute position of the object. Accordingly, the number of periods from an origin with respect to a predetermined detector is determined employing the present output signals of the respective detectors as a parameter and the absolute position is specified by a combination of an integer section of this number of periods and a value below one period represented by the output signal of this predetermined detector.

System for detecting an absolute position

About a bobbin, there are wound primary coils in axially displaced locations and wound also is a secondary coil. A core is linearly slidably provided in the bobbin. The primary coils are individually excited by AC signals which are out of phase with each other, e.g. a sine wave signal and a cosine wave signal. The secondary coil thereupon produces an output signal resulting from phase shifting the applied sine or cosine wave signal in accordance with a linear position of the core. Accordingly, the linear position can be detected by measuring phase difference between a reference AC signal and the output signal of the secondary coil. Likewise, velocity and acceleration change may be determined using the position change data.

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Tokyo, Japan

Wataru Shimizu