Shin-etsu Polymer Co., Ltd.

Wataru Niiya

Hiroshi Mimura

Toshitsugu Yajima

Toshiyuki Kamada

A substrate storage container which includes: a front-opening box type container body for storing a multiple number of substrates in alignment therein; a door for opening and closing the open front of the container body in a sealing manner; and inner-pressure adjustment devices attached to the mounting ports in the container body and the door for adjusting the pressure inside the container body closed with the door. The inner-pressure adjustment device is configured of an elastic attachment cylinder, a filter support structure fitted into, and protected by, the attachment cylinder and a multiple number of filters held inside the filter support structure. Since the inner-pressure adjustment device can be set by mounting an attachment cylinder of a simple structure by use of elastic deformation to the attachment hole, which is provided for the container body and/or the door, there is no need of forming screw holes which need time and effort.

Substrate storage container

The precision substrate storage container includes a bottom plateremovably attached to the bottom of a container bodyin which a multiple number of semiconductor wafers are accommodated in alignment; a holderremovably supported on bottom plate; and a RFID system transponderheld in holder. Bottom plateincludes a base plateopposing the rear bottom of container bodyand a wall plateerected on base plate. The base plateis formed with a first supporting structurefor supporting holderthat is oriented in the horizontal direction and a second supporting structurefor supporting holderthat is oriented in the vertical direction so as to selectively change the position of holdertaking one of the two directions, longitudinal and transverse.

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Itoigawa, Japan

Wataru Niiya