Kla Tencor Corporation

Agilent Technologies, Inc.

Mts Systems Corporation

Other

Martin Marietta Energy Systems, Inc.

Haynes International, Inc.

Nanomechanics, Inc.

Nanonmechanics, Inc.

Warren C Oliver

John B Pethica

Jennifer Hay

Michael P Drake

Sudharshan Phani Pardhasaradhi

Peter J Blau

John Swindeman

John Swindernan

Kurt Johanns

Karmit Parks

Erik G Herbert

Kermit H Parks

P Sudharshan Phani

Richard Anthony

A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.

Apparatus and method for two dimensional nanoindentation

A mechanical testing system having a frame, and a stage for holding a sample. An arm for pressing a tool against a surface of the sample. A primary actuator is connected to the frame and applies a primary force and drives the tool relative to the sample, thereby causing the frame to flex. A displacement sensor measures a displacement value comprised of two components, the first component including a distance traveled by the probe into the sample as the primary force is applied, and the second component including a measure of a degree of flex of the frame as the primary force is applied. A compensating actuator is connected to the frame and applies a compensating force that reduces the second component of the displacement value.

Compensated mechanical testing system

A heated or cooled sample holding stage for use in a nanoindentation measurement system is described. The geometry of the design and the selection of materials minimizes movement of a sample holder with respect to a nanoindentation tip over a wide range of temperatures. The system controls and minimizes motion of the sample holder due to the heating or cooling of the tip holder and/or the sample holder in a high temperature nanoindentation system. This is achieved by a combination of geometry, material selection and multiple sources and sinks of heat. The system is designed to control both the steady state and the transient displacement response.

Structure for achieving dimensional stability during temperature changes

The application describes an electromechanical actuator for generating a mechanical force to be transferred to an apparatus. The electromechanical actuator comprises an electromagnetic coil, a connecting member, and a magnet. The connecting member is mechanically coupled between the electromagnetic coil and the apparatus and is configured to transfer the mechanical force from the electromagnetic coil to the apparatus. The magnet is disposed between the electromagnetic coil and the apparatus and includes a channel in which the electromagnetic coil is disposed, the channel having a channel opening that faces away from the apparatus, the magnet further having a central hole through which the connecting member extends.

Electromechanical actuator to reduce heating effects

A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the interferometer determining a distance between a reference location and the moveable reflector. The rod is characterized by a rod axis and includes a tip on a first end thereof, the rod includes the moveable reflector at a location proximate to the tip. The tip is disposed in a manner that allows the tip to be forced against the surface of a sample. The force actuator applies a force to the rod in a direction parallel to the rod axis in response to a force control signal coupled to the actuator. The controller receives the determined distance from the interferometer and generates the force control signal. The invention can also be used as a scanning probe microscope.

Scanning probe microscope with independent force control and displacement measurements

Concepts presented herein relate to a portable device that includes a frame and a fixture for engaging a mechanical probe to be calibrated. The fixture can be a platform of hard material that receives pushing action of the mechanical probe. A displacement sensor senses position of the platform with respect to the frame. An actuator is coupled to the displacement sensor and a controller is coupled to the actuator. The controller operates the actuator to cause the platform to move to a position (as indicated by the displacement sensor), while the force required to cause the displacement is measured with a force sensor.

Calibrating force and displacement sensors of mechanical probes

A method and system are provided for obtaining force-displacement responses for a specimen or sample of material. The sample is supported with a spanning portion spanning in an environment between at least three points not in a line, wherein the points are fixed relative to each other, and wherein the spanning portion is capable of displacement relative to the points. An oscillating mechanical excitation at at least one frequency and at at least one known amplitude is applied to the spanning portion. In addition, at least one other mechanical excitation is also applied to the spanning portion independently of the oscillating mechanical excitation.

Measurement of properties of thin specimens based on experimentally acquired force-displacement data

The invention relates to a method and device for providing damping in a displacement device that moves an element. The displacement device has a permanent magnet generating a first magnetic field and a first coil movable with the element. The first coil receives a selected current from an external source to generate a second magnetic field. The damping method includes moving a second coil in at least one magnetic field to generate a current in the second coil. The method includes varying the current in the second coil to vary the damping in the displacement device.

Variable electromagnetic damping apparatus

A material testing system includes a base and first and second specimen holders. A first displacement sensor measures displacement of the first specimen holder relative to the base. In addition, a second displacement sensor measures displacement of the second specimen holder relative to the base.

Statistically rigid and dynamically compliant material testing system

A scanning micro-sclerometer measures changes in contact stiffness and correlates these changes to characteristics of a scratch. A known force is applied to a contact junction between two bodies and a technique employing an oscillating force is used to generate the contact stiffness between the two bodies. As the two bodies slide relative to each other, the contact stiffness changes. The change is measured to characterize the scratch.

Scanning micro-sclerometer

A method for continuously measuring the stiffness and area of contact between two bodies is provided. Elastic stiffness of a junction is measured by introducing a relatively small oscillatory mechanical force at a known frequency to the junction and measuring the subsequent displacement response using AC signal-handling techniques to provide a continuous measurement proportional to the stiffness and the area of contact between the bodies, even as the area of contact changes.

Method for continuous determination of the elastic stiffness of contact

Disclosed is a series of silicon rich nickel-base alloys that have a high degree of ductility and hot working properties. The alloys have the corrosion resistant characteristics comparable to cast HASTELLOY.RTM. alloy D (Ni - 9 Si - 3 Cu). The alloys have good tensile strength at temperatures up to 600.degree. C. comparing favorably with Alloy IN 718. In addition, the alloys may be produced by super plastic forming (isothermal forging). The nickel-base alloy typically contains 7 to 14% silicon, 0.5 to 6% vanadium, plus a number of optional modifying elements.

Growing community of inventors

Knoxville, TN, United States of America

Warren C Oliver