Globalfoundries Inc.

Ward A Johnson

Anthony K Stamper

Kimball M Watson

Jenifer E Lary

Pui Ling Yee

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition.

Micro-electro-mechanical system (MEMS) structure and design structures

Methods for processing a metal pad of a chip and chip structures including a chip with a metal pad. A surface modification agent is applied to the metal pad on the chip. The surface modification agent is effective to increase the hydrophobicity of the metal pad and may involve silylation.

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Colchester, VT, United States of America

Ward A Johnson