Asm IP Holding B.v.

Wan Gyu Lim

Tae Hee Yoo

Yong Min Yoo

Sun Ja Kim

Young Jae Kim

Jong Wan Choi

Yoon Ki Min

Seung Ju Chun

Hae Jin Lee

Dae Youn Kim

Young Hoon Kim

Yong Gyu Han

Jin Geun Yu

Provided is a method of depositing a thin film on a pattern structure of a semiconductor substrate, the method including (a) supplying a source gas; (b) supplying a reactive gas; and (c) supplying plasma, wherein the steps (a), (b), and (c) are sequentially repeated on the semiconductor substrate within a reaction space until a desired thickness is obtained, and a frequency of the plasma is a high frequency of 60 MHz or greater.

Method of depositing thin film and method of manufacturing semiconductor device

A method of processing a substrate by omitting a photolithographic process is disclosed. The method includes forming at least one layer on a stepped structure having an upper surface, a lower surface, and a side surface that connects the upper surface to the lower surface, selectively densifying portions of the at least one layer respectively on the upper surface and the lower surface via asymmetric plasma application, and performing an isotropic etching process on the at least one layer. During the isotropic etching process, the portion of the at least one layer formed on the upper surface is separated from the portion of the at least one layer formed on the lower surface.

Method of processing a substrate and a device manufactured by using the method

A method of processing a substrate to enable selective doping without a photolithography process is provided. The method includes forming a diffusion barrier on the substrate having a patterned structure using plasma deposition method, removing the diffusion barrier except for part of the diffusion barrier using wet etching, forming a diffusion source layer on the patterned structure and the part of the diffusion barrier, and applying energy to the diffusion source layer.

Method of processing substrate

Growing community of inventors

Gyeonggi-do, South Korea

Wan Gyu Lim