Taiwan Semiconductor Manufacturing Comp. Ltd.

Tsinghua University

Wan-Chen Chen

Yu-Hsiung Wang

Han-Yu Chen

Kuo-Chi Tu

Sheng-Hung Shih

Harry-Hak-Lay Chuang

Tzu-Yu Chen

Kuo-Chyuan Tzeng

Fu-Chen Chang

Po-Yuan Teng

Chang-Chih Huang

Chu-Jie Huang

Po-Wen Chiu

Wei-Jen Hsu

Various embodiments of the present disclosure are directed towards a memory cell comprising a blocking layer configured to block diffusion of metal from an electrode of the memory cell to a ferroelectric layer of the memory cell. More particularly, the blocking layer and the ferroelectric layer are between a top electrode of the memory cell and a bottom electrode of the memory cell, which both comprise metal. Further, the blocking layer is between the ferroelectric layer and the electrode, which corresponds to one of the top and bottom electrodes. In some embodiments, the metal of the one of the top and bottom electrodes has a lowest electronegativity amongst the metals of top and bottom electrodes and is hence the most reactive and likely to diffuse amongst the metals of top and bottom electrodes.

Ferroelectric memory device with blocking layer

Various embodiments of the present disclosure are directed towards methods for forming conductive lines and conductive sockets using mandrels with turns, as well as the resulting conductive lines and sockets. A conductive socket of the present disclosure may have a top layout with at least one turn and with a width that is substantially the same as that of conductive lines along the at least one turn. Such a top layout may reduce loading during formation of the conductive socket. Conductive lines of the present disclosure may comprise outer conductive lines and inner conductive lines having ends laterally offset from ends of the outer conductive lines along lengths of the conductive lines. Formation of the inner and outer conductive lines using a mandrel with a turn may enlarge a process window while cutting ends of a sidewall spacer structure from which the inner and outer conductive lines are formed.

Layout for reducing loading at line sockets and/or for increasing overlay tolerance while cutting lines

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a semiconductor substrate having sidewalls that define a recess within an upper surface of the semiconductor substrate. A plurality of upper electrode segments are arranged over the semiconductor substrate and are vertically separated from the upper surface of the semiconductor substrate by a first dielectric layer. A lower electrode segment is arranged directly between the sidewalls of the semiconductor substrate and directly between adjacent ones of the plurality of upper electrode segments. A second dielectric layer is arranged directly between the sidewalls of the semiconductor substrate and the lower electrode segment and also directly between the plurality of upper electrode segments and the lower electrode segment.

Inter-digitated capacitor in flash technology

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a plurality of upper electrodes disposed over a substrate and a lower electrode disposed between the plurality of upper electrodes. A charge storage layer continuously extends from along a first side of the lower electrode to along a second side of the lower electrode opposing the first side. The charge storage layer separates the lower electrode from the plurality of upper electrodes and the substrate. A silicide is disposed over the lower electrode and the plurality of upper electrodes. The silicide has sidewalls that are laterally separated by a distance directly overlying a top of the charge storage layer.

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a plurality of upper electrodes separated from a semiconductor substrate by a first dielectric layer. A lower electrode is laterally disposed between the plurality of upper electrodes and between sidewalls of the semiconductor substrate. A second dielectric layer lines opposing sidewalls and a lower surface of the lower electrode. The second dielectric layer laterally separates the lower electrode from the plurality of upper electrodes and from the sidewalls of the semiconductor substrate.

Inter-digitated capacitor in split-gate flash technology

The present disclosure relates to an integrated chip having an inter-digitated capacitor, and an associated method of formation. In some embodiments, the integrated chip has a plurality of upper electrodes separated from a substrate by a first dielectric layer. A plurality of lower electrodes vertically extend from between the plurality of upper electrodes to locations embedded within the substrate. A charge trapping dielectric layer is arranged between the substrate and the plurality of lower electrodes and between the plurality of upper electrodes and the plurality of lower electrodes. The charge trapping dielectric layer has a plurality of discrete segments respectively lining opposing sidewalls and a lower surface of one of the plurality of lower electrodes.

The present disclosure relates to an inter-digitated capacitor that can be formed along with split-gate flash memory cells and that provides for a high capacitance per unit area, and a method of formation. In some embodiments, the inter-digitated capacitor has a well region disposed within an upper surface of a semiconductor substrate. A plurality of trenches vertically extend from the upper surface of the semiconductor substrate to positions within the well region. Lower electrodes are arranged within the plurality of trenches. The lower electrodes are separated from the well region by a charge trapping dielectric layer arranged along inner-surfaces of the plurality of trenches. A plurality of upper electrodes are arranged over the semiconductor substrate at locations laterally separated from the lower electrodes by the charge trapping dielectric layer and vertically separated from the well region by a first dielectric layer.

Interdigitated capacitor in split-gate flash technology

A method for controllable layer-by-layer removal of graphene layers is provided. The method includes the steps of: disposing a single-layer or multi-layer graphene on a heat source, arranging graphene layer or layers in a sealed chamber filled with ozone gas, and removing a targeted area of graphene with a laser. The method provides low-temperature removal of graphene layer-by-layer. The heat source, laser, and the highly oxidizing ozone gas selectively control the removal of graphene layers.

Growing community of inventors

Hsinchu, Taiwan

Wan-Chen Chen