Texas Instruments Corporation

Walter Scott Idol

Bhaskar Srinivasan

Brian Goodlin

Ming-Yeh Chuang

A fin field-effect transistor ('FinFET') semiconductor device and method of forming the same. In one example, a semiconductor fin is formed over a semiconductor substrate. A conformal dielectric layer is formed on a top and side surfaces of the fin. A doped semiconductor layer is formed over the conformal dielectric layer, the doped semiconductor layer including a dopant. The doped semiconductor layer is heated thereby driving the dopant through the conformal dielectric layer and forming a doped region of the fin.

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Plano, TX, United States of America

Walter Scott Idol