Texas Instruments Corporation

Walter J Edmonds

Timothy Vaughn

Wylie K Moreshead

A liner ( ) for an arc chamber ( ) of an ion implanter. The arc chamber ( ) comprises a liner ( ) on the inner surface ( ) of the arc chamber ( ) that extends the life of the arc chamber ( ). The liner ( ) comprises a one piece portion ( ) that covers the bottom and long sidewalls of the arc chamber ( ) and two end plates ( ) for covering the end walls of the arc chamber ( ). When the liner ( ) wears out it is replaced at a significantly reduced cost compared to replacing the entire arc chamber ( ).

Extended life source arc chamber liners

A suppression electrode assembly (18) comprises an electrode suppression plate (40) constructed of a material having substantial strength and durability and has an aperture seat (76) with an opening (72) defined therein. An aperture insert (80) constructed from graphite is slidably engageable with the aperture seat (76). The aperture insert (80) defines an elongated slit (84) which is in general alignment with the aperture seat opening (72) when the aperture insert (80) is installed in the seat (76).

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Allen, TX, United States of America

Walter J Edmonds