Dr. Johannes Heidenhain Gmbh

Johannes Heidenhain Gmbh

Other

Dr. Johannas Heidenhain Gmbh

Walter Huber

Wolfgang Holzapfel

Ralph Joerger

Michael Hermann

Volker H&ouml;fer

Dieter Michel

Sebastian Tondorf

Erwin Spanner

Karsten Sändig

Elmar Josef Mayer

Ulrich Benner

Andreas Franz

Volker Hoefer

Michael Allgauer

Peter Pechak

Birgit Lange

Herbert Mauerberger

Volker Höfer

Udo Linnemann

Josef H&ouml;hentinger

Franz Obermaier

Hans R Kober

Völker Hofer

Michael Aligauer

Volker HÖFER

In an optical position measuring device for the interferential determination of the relative distance of two objects which are movable relative to each other in at least one measuring direction, a bundle of rays emitted by a light source is split up into at least two partial bundles of rays, which fall on a grating or a plurality of gratings on separate optical paths and undergo distance-dependent phase shifts as a result. The partial bundles of rays are superpositioned at a mixing grating, whereupon at least three pairs of interfering partial bundles of rays propagate in different directions in space. Via the mixing grating, each pair of interfering partial bundles of rays is focused on a detector element so that at least three position-dependent, phase-shifted incremental signals are detectable via the detector elements.

Optical position measuring device

In a device for measuring the vibrational amplitude of a capillary tube of a wire bonder, the capillary tube is placed between a light source and a detector system, so that the vibrational amplitude is able to be ascertained from the shading of a beam of light by the capillary tube. The beam of light emitted by the light source is split into a measuring beam of light and a reference beam of light, an edge of the capillary tube at least partially shading the measuring beam of light in the vibrating state, while the reference beam of light is not shaded. The detector system includes a measuring detector assigned to the measuring beam of light as well as at least one reference detector assigned to the reference beam of light, and the vibrational amplitude of the capillary tube is ascertainable from the interconnected output signals of the measuring detector and the reference detector.

Device for measuring the vibrational amplitude of a capillary tube of a wire bonder

A device for position determination includes a light source and a planar measurement reflector movable along a measurement direction oriented perpendicular to the measurement reflector. A detector device is disposed such that a beam emitted by the light source strikes the detector device after impinging on the measurement reflector so that, in an event of a movement of the measurement reflector along the measurement direction, a signal results which is dependent on a position of the measurement reflector and from which a reference signal is generatable at a defined reference position. A deflection unit is disposed so as to deflect the beam such that the beam strikes the measurement reflector twice and therebetween passes through the deflection unit. The deflection unit is arranged so that a deviation in beam direction, resulting after the first reflection from a tilt of the measurement reflector, is compensated after the second reflection.

Device for position determination

A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams.

Device for interferential distance measurement

An optical position-measuring device senses a relative position of two objects. A reflection material measure is connected to one object and a scanning unit is connected to the other object. A beam is split into three sub-beams in a first splitting plane by a first splitting element. The first and third sub-beams are deflected toward the reflection material measure by the deflecting elements, while the second sub-beam is split into fourth and fifth sub-beams by a second splitting element. The first and fourth sub-beams propagate as a first pair of superimposed sub-beams and the third and fifth sub-beams propagate as a second pair of superimposed sub-beams. The first and second pairs of superimposed sub-beams, after being reflected by the reflection material measure, propagate respectively toward detectors, where the sub-beams in each pair are brought into interfering superposition, so that the detectors detect displacement-dependent scanning signals.

Optical position-measuring device

A device for interferential distance measurement that includes a measurement reflector having a surface and a light source emitting a beam parallel to the surface. The device includes a splitter element including a splitter grating that is disposed perpendicular to the surface, wherein the splitter grating receives the beam and splits the beam into a measurement beam and a reference beam, wherein the measurement beam acts at least twice upon the measurement reflector along a path of the measurement beam. The device including a combining element, at which the measurement beam and the reference beam enter into interferential superposition to form interfering measurement and reference beams. The device further includes a detector arrangement, by way of which a scanning signal pertaining to a distance between the measurement reflector and a component of said device in a measuring direction can be generated from the interfering measurement and reference beams.

Device for distance measurement

A device for interferential distance measurement that includes a light source that emits a light beam along a propagation direction and a scanning plate including a splitter that splits the light beam into a measurement beam and a reference beam. The device further including a reflector disposed spaced-apart in a direction of the propagation direction and a detector element. The measurement beam and the reference beam are propagated from the splitter along different optical paths toward the reflector, where a back reflection of the measurement beam and the reference beam occurs at the reflector toward the scanning plate. In addition, at a combining location the measurement beam and the reference beam attain interfering superposition, and wherein the measurement beam and the reference beam interfering at the combining location are detected by the detector element so that the detector element generates a distance signal regarding a distance between the scanning plate and the reflector.

An optical position-measuring device includes a scanning bar extending in a first or second direction, and a scale extending in the other direction. The scale is offset by a scanning distance from the scanning bar in a third direction perpendicular to the first and second directions. The device has a light source whose light penetrates the scanning bar at an intersection point of the scanning bar and scale to fall on the scale and arrive back at the scanning bar. At a detector, the light is split by diffraction into different partial beams at optically effective structures of the scanning bar and scale and combined again. A periodic signal is obtained in the detector in response to: a shift between the scanning bar and scale in the first direction due to interference of combined partial beams, and a change in the scanning distance between the scanning bar and scale.

Optical position-measuring device having two crossed scales

An interferometric distance measurement device that includes a light source that emits a beam of light and a scanning unit. The scanning unit includes a scanning plate having a splitter that splits the beam of light into a measurement beam and a reference beam, wherein the reference beam is propagated solely within the scanning plate before reaching interferential superposition with the measurement beam at a unification site. A reflector is provided, wherein the reflector is embodied such that the measurement beam striking the reflector undergoes retroreflection in a direction regardless of any possible relative tilting of the scanning unit and of the reflector downstream of the unification site. A detector arrangement is provided in which a distance signal relating to a distance between the scanning plate and the reflector is detectable from interference between the measurement beam and the reference beam.

Interferometric distance measurement device using a scanning plate and transparent carrier substrate containing a reflector element

An optical position measuring arrangement including a source of illumination that generates one or several bundles of illuminating beams, a measuring graduation that is illuminated by the source of illumination so as to generate a periodic fringe pattern of a defined fringe pattern period and a fiber-optical scanning head, wherein the fiber-optical scanning head scans the periodic fringe pattern. A scanning plate is arranged in the fiber-optical scanning head, wherein the scanning plate is matched to the fringe pattern period and scans the periodic fringe pattern. Fringe patterns, which are phase-shifted in relation to each other, are generated within a fringe pattern period in bundles of partial signal beams in the one or several bundles of illuminating beams via a wavelength-dependent local separation, and the bundles of partial signal beams are employed for conversion into position-dependent phase-shifted scanning signals.

Optical position measuring arrangement

A position-measuring device includes: a measuring graduation provided on a measuring standard device arranged around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using electromagnetic radiation; a scanning plate with a scanning graduation, formed by a scanning grating, extending along a detection axis, which is arranged in the beam path of the electromagnetic radiation used for scanning the measuring graduation, so that the radiation interacts both with the scanning graduation and with the measuring graduation; and a detector of the scanning unit, whose detector surface is used for detecting the electromagnetic radiation after interaction with the scanning graduation and the measuring graduation and which is present as a stripe pattern, in order to record motions of the measuring standard device relative to the scanning unit. The grating constant of scanning graduation varies along the axis of extension of the scanning graduation such that the distances on which the phase of the stripe pattern present at the detector surface extends through a change by 2&#x3c0;, are constant.

Position-measuring device

A position-measuring device includes: a measuring graduation provided on a material measure going around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using electromagnetic radiation; a scanning plate with a periodic scanning graduation which is arranged in the beam path of the electromagnetic radiation used for scanning the measuring graduation, so that the radiation interacts both with the scanning graduation and with the measuring graduation; and a detector of the scanning unit, the detector surface of which is used for detecting the electromagnetic radiation after interaction with the scanning graduation and the measuring graduation and which is arranged with a period (P) for detecting electromagnetic radiation in the form of a stripe pattern. The period Pof the measuring graduation and the period Pof the scanning graduation may be coordinated so that 1/(1/P&#x2212;1/P)&#x3c;P.

A scanning unit for a position measuring device for scanning a measuring graduation thereof, includes a scanning structure provided on a carrier and formed such that, by interaction of electromagnetic radiation, with the measuring graduation and the scanning structure, a periodic stripe pattern is generated. A detector arrangement includes detector elements of different phases that generate output signals having a phase shift. The detector elements form a periodic pattern, and each detector element is assigned exactly one region of the scanning structure referred to as a bar. The detector elements are combined to form two detector groups. Detector elements of the same phase belong to the same detector group, and the detector elements within one detector group are interconnected. The bars of each detector group cover an active area of equal size. The area center of gravity of the area covered by the bars of the detector groups coincide.

Scanning unit for a position measuring device

An interferential position measuring arrangement including a light source, which emits a beam of rays and an optical element, which converts the beam of rays emitted by the light source into an incoming beam of rays. A scale grating which splits the incoming beam of rays into a first partial beam of rays and a second partial beam of rays. A first scanning grating that causes splitting of the first partial beam of rays and a second scanning grating that causes splitting of the second partial beam of rays, wherein a periodically modulated interferential fringe pattern with definite spatial interferential fringe pattern period results in a detection plane. A detection arrangement which causes splitting of light entering through the detection arrangement into at least three different spatial directions and optoelectronic detector elements arranged in the at least three spatial directions for detecting phase-shifted scanning signal.

Interferential position measuring arrangement

A position measuring system that includes a scale having an incremental graduation track of a defined incremental graduation period and on at least one defined reference position, a reference marking field with a mean reference marking graduation period. A scanning unit movable with respect to the scale, the scanning unit having a plurality of scanning elements for generating scanning signals, wherein at least two phase-shifted incremental signals are generated as scanning signals. A first evaluation device that determines a rough reference position. A second evaluation device that determines a beat signal phase. A third evaluation device, which is suitable for unequivocally marking a beat signal period from the rough reference position and, if a defined phase position exists, to issue a fine reference position from the beat signal phase.

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Traunstein, Germany

Walter Huber