Leybold-heraeus Gmbh

Leybold Aktiengesellschaft

Walter Heil

Friedrich Stark

Otto-Horst Hoffmann

Peter Sommerkamp

A substrate table (4) is fixed to a rotatably mounted hollow shaft (3) in a vacuum coating tank (1). The shaft (3) has a first portion passing sealingly through a wall of the tank and a second portion which has a larger diameter than the first portion in the tank. The first portion has axial supply passages connected to a chamber in the second portion where electrical connectors and coolant distribution means are housed.

Coating apparatus

A vaporizer for vacuum deposition installations has at least one crucible and a plurality of crucible-receiving recesses movable into a vaporizing position, a vapor-conducting device and a shutter for interrupting the flow of vapor. The vaporizer is capable of enabling a plurality of different substances to be vaporized in succession without mutual contamination by providing the vapor-conducting device wherein the device has a plurality of vapor screens which can be individually set down at the edges of the crucible-receiving recesses by relative movement between the vapor-conducting device and the crucible. The shutters have a plurality of lobes which can be individually moved over the particular vapor screen located in the vaporizing position. The drives associated with the vapor-conducting device and shutter are interconnected such that the same vapor screen and the same shutter lobe are always associated with a particular crucible-receiving recess.

Vaporizer for vacuum deposition installations

An operating mechanism for valves and the like comprises a housing with a port situated therein which is to be opened and closed. Associated with the port is a seat and a valve plate for closing the port. A rotatable shaft drive mechanism for the valve plate includes a shaft which rotates in one direction to effect movement of the valve plate from its open position to its closed position followed by a pressing movement over the valve plate against the seat and rotates in the other direction to effect movement of the valve plate in the opposite direction. The rotatable shaft drive mechanism includes an intermittent drive for the transformation of the rotatory movement of the shaft to the desired movement of the valve plate.

Growing community of inventors

Neuberg, Germany

Walter Heil