International Business Machines Corporation

Walter F Lange

Da-Yuan Shih

Sheree H Wen

Jungihl Kim

Paul H Palmateer

Warren D Grobman

Anthony F Arnold

Timothy W Carr

Derry J Dubetsky

Carl P Hayunga

David W Boss

Joseph A Corso

George M Greenstein

Robert H Massey

John A Romano

Amanda H Kumar

Shukla Kapur

Sealing and stress relief are provided to a low-fracture strength glass-ceramic substrate. Hermeticity is addressed through the use of capture pads in alignment with vias and through polymer overlays with interconnection between the underlying via or pad metallurgy and the device, chip, wire or pin bonded to the surface of the layer. Multilevel structures are taught along with a self-aligned sealing and wiring process.

Sealing and stress relief layers and use thereof

A multilayered thin film structure for attaching input/output pins to a ceramic substrate, and method of making the thin film structure are disclosed. A thin adhesion layer, which can suitably be a refractory metal such as titanium, vanadium, chromium or tantalum, is first formed on the surface of the substrate. A thick stress reducing layer of soft metal such as copper, silver, nickel, aluminum, gold or iron is subsequently formed over the adhesion layer. To prevent the soft metal from reacting with subsequently brazed gold-tin pin eutectic alloy, a reaction barrier layer which can be titanium or zirconium is then deposited over the soft stress reducing metal cushion layer. The process is completed by finally depositing a gold layer over the reaction barrier layer.

Multilayer thin film metallurgy for pin brazing

A layer of zirconium can be used as an adhesion layer between a ceramic or polyimide substrate and subsequently applied metallic layers. Following the zirconium layer, copper can be deposited followed by a reaction barrier layer and a wettable surface layer such as gold. This type of structure can be used for pin bracing, chip joining, and/or wire connections.

Zirconium as an adhesion material in a multi-layer metallic structure

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Longmont, CO, United States of America

Walter F Lange