Balzers Aktiengesellschaft

Unaxis-Balzers Aktiengesellschaft

Walter Albertin

Walter Haag

Hans Hirscher

Pius Gruenenfelder

Magnetron sputtering source and method of use thereof

A magnetron sputtering source and a method of use thereof on which the sputtering source has at least two toroidal magnetron electron taps each defining a maximum of a magnetic field strength component in a radial direction along a surface of the sputtering source. Thereby, from each one of a ring zone on a first smaller radius R.sub.1F and a second larger radius R.sub.2F, a plane of the workpiece in a holder facing the sputtering source has a corresponding distance d.sub.1 and d.sub.2. A value d assumes all possible values of d1 and d2. In particular,

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Bad Ragaz, Switzerland

Walter Albertin