Air Liquide America, L.p.

Wallace Yuan

Joe G Hoffman

Mary Dykstra Havlicek

A method of integrated resin preconditioning and hydrogen peroxide purification is provided. The method includes preconditioning a resin by washing the resin with deionized water to produce a washed resin, and contacting an effective amount of a preconditioning hydrogen peroxide solution with the washed resin to remove impurities from the washed resin, thereby producing a preconditioned resin. The method further includes passing a hydrogen peroxide solution to be purified through a bed of the preconditioned resin to form a hydrogen peroxide solution having a TOC content lower than a TOC content of the hydrogen peroxide solution to be purified, and passing the hydrogen peroxide solution having a TOC content lower than the TOC content of the hydrogen peroxide solution to be purified through one or more ion-exchange resin beds or directing the hydrogen peroxide solution having a TOC content lower than the TOC content of the hydrogen peroxide solution to be purified to a point of use in a semiconductor manufacturing facility the. The preconditioning hydrogen peroxide solution does not pass through the ion exchange resin beds and is not directed to the point of use.

Integrated method of preconditioning a resin for hydrogen peroxide purification and purifying hydrogen peroxide

Provided are ionic purifiers and methods that are suitable for providing an ultra-high-purity chemical to a semiconductor manufacturing process. The ionic purifiers include a vapor inlet introducing a chemical vapor to be purified into a column. A high-purity water inlet continuously introduces high-purity water into the column. The high-purity water contacts the chemical vapor to be purified, thereby forming a purified chemical vapor and contaminated water. A vapor outlet removes the purified chemical vapor from the column. A liquid outlet removes the contaminated water from the column. The invention has particular applicability in the semiconductor manufacturing industry.

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Wallace Yuan