Bruker Nano Gmbh

Waldemar Hahn

Meiken Falke

Daniel Radu Goran

The present invention refers to an apparatus () and a method for detecting characteristics of a probe. In an embodiment, the apparatus () comprises a vacuum chamber () and a beam generator () adapted to generate a beam of charged particles within the vacuum chamber (). When the beam of charged particles falls onto the probe, interaction particles and/or interaction radiation are generated. The apparatus () further comprises an electromechanical unit () within the vacuum chamber () and a detector () comprising a plurality of detection units and being arranged on the electromechanical unit () allowing for the detector () to move from a first position () with respect to the beam generator () to a second position () with respect to the beam generator () and vice versa, upon a corresponding actuation of the electromechanical unit () performable from outside of the vacuum chamber ().

Moveable detector

The invention relates to a photon detector (), in particular an x-ray detector, in the form of a measurement finger, which extends along a detector axis () and has a detector head () at a first end of the measurement finger, wherein the detector head () comprises a plurality of at least two detector modules (), each comprising a sensor chip () sensitive to photon radiation (), in particular x-radiation, said sensor chip having an exposed end face () and a face facing away from the end face (), wherein the detector modules () are arranged around the detector axis () in a plane () extending orthogonally to the detector axis ().

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Berlin, Germany

Waldemar Hahn