Murata Manufacturing Co., Ltd.

Murata Manufacturingco., Ltd.

Wakana Hirota

Ville Kaajakari

Toshio Nishimura

Yuichi Goto

Toshihiko Unami

Yoshihisa Inoue

The resonator includes a vibrating portion that has three or more vibrating arms each having a fixed end and an open end and at least two vibrating arms undergoing out-of-plane bending in different phases. Moreover, the resonator includes a first base portion having a first front end connected to the fixed ends and a first rear end facing the first front end, a second base portion having a second front end facing the first rear end and a second rear end facing the second front end, and a connecting portion connected between a vicinity of a center of the first rear end and a vicinity of a center of the second front end, a holding portion that is provided in at least a part of a periphery of the vibrating portion, and a holding arm that is provided between the vibrating portion and the holding portion.

Resonator and resonance device

A resonator that includes a substrate, an insulating film that is formed on the substrate, and vibration regions each of which is formed on the insulating film and includes lower electrodes that are formed on the insulating film, a piezoelectric film that is formed on the lower electrodes, and an upper electrode that is formed on the piezoelectric film. At least one lower electrode of the lower electrodes that are formed on the insulating film has an electric potential that differs from an electric potential of another lower electrode such that at least one vibration region vibrates in antiphase with another vibration region. Moreover, a package seals a resonator and includes the substrate, the insulating film, and the vibration regions and includes a ground terminal for grounding the substrate.

Resonance device

A resonator includes a vibrator with a base, and multiple vibrating arms extending therefrom. Moreover, a frame surrounds a periphery of the vibrating part and a holding arm couples the vibrator to the frame. The holding arm includes a pair of first support arms that are connected to the base opposite the vibrating arms and a coupling portion that couples the support arms with one another and that is connected to the frame.

Resonator and resonator device

In a resonator is provided that suppresses a shift of a resonant frequency. The resonator includes a vibration portion that has a base with front and rear ends and multiple vibration arms with fixed ends connected to the front end of the base and that extend away from the front end. Moreover, the resonator includes a frame that at least partially surrounds the vibration portion and one or more holding arms provided between the vibration portion and the frame with first ends connected to the base and the second ends connected to a region of the frame at the front end side relative to the rear end of the base portion.

A resonator including a base; two or more vibration arms connected at ends thereof to a front end of the base and spaced apart from each other across a predetermined space and extending away from the base. Moreover, a connection member connects the vibration arms that bend in the same direction when an electric field is applied. The resonator inhibit occurrence of a spurious mode that otherwise occurs in a resonator that performs out-of-plane bending.

A resonator is provided that suppresses frequency variations with etching without decreasing the strength of vibration arms. The resonator includes a base portion, a first vibration portion extending from the base portion in a first direction and having a first width, and a second vibration portion extending from the base portion in the first direction with a first gap between the first and second vibration portions and having the first width. The first and second vibration portions perform out-of-plane bending vibration with opposite phases at a predetermined frequency. The predetermined frequency varies in accordance with the first width and the first gap. The ratio of the first gap to the first width is within a range that causes an absolute value of rates of variations in the predetermined frequency with respect to variations in the first width and in the first gap to be not more than about 100 ppm.

A resonance device is provided with a reduced size and also suppresses the occurrence of deformation and breakage during operation. The resonance device includes a lower substrate, an upper substrate that defines a vibration space between the lower substrate and the upper substrate, a protruding portion that is formed on an inner surface of the lower or upper substrates. Moreover, a resonator is disposed in the vibration space and includes a base portion and vibration arms that extend in parallel to one another from the base portion along the inner surface of the lower substrate or the inner surface of the upper substrate and that vibrate in a vertical direction toward the inner surface of the lower substrate or the inner surface of the upper substrate.

A resonator is provided that suppresses a shift in resonant frequency. The resonator includes a vibration member including vibration arms extending therefrom with two or more of the vibration arms performing out-of-plane bend with different phases. Moreover, the resonator includes a base having a front end connected to the vibration arms and a rear end opposing the front end and structured to bend in a direction of the out-of-plane bend when the vibration arms perform the out-of-plane bend. Moreover, a frame surrounds a periphery of the vibration member and one or more holding arms are positioned between the vibration member and the frame. One end of each holding arm is connected to the base and the other end of the holding arm is connected to the frame. The holding arms bend in the direction of the out-of-plane bend when the base bends.

A resonator includes a vibration portion with a base and a plurality of vibration arms each having a fixed end and a free end with the fixed end being connected to the base. Each of the plurality of vibration arms includes a piezoelectric thin film and an electrode stacked on the piezoelectric thin film. Moreover, a width of each of the plurality of vibration arms increases from the fixed end toward the free end. In addition, a width of the electrode of each of the plurality of vibration arms increases from the fixed end towards the free end of the vibration arm.

Resonator and resonation device

A resonance device is provided having a resonator with opposing upper and lower lids. The resonator includes a base, and multiple vibration arms that are connected to a front end of the base so as to extend away from the base. Moreover, a frame surrounds a periphery of the base portion and the vibration arms and one or more holding arms connect the base to the frame. The base, the vibration arms, and the holding arm include a substrate and a temperature characteristics correction layer laminated on the substrate and having a material with a coefficient of thermal expansion different from that of the substrate. The base, the vibration arms, and the holding arm are formed integrally with the substrate and the temperature characteristics correction layer.

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Nagaokakyo, Japan

Wakana Hirota