Taiwan Semiconductor Manufacturing Comp. Ltd.

Wai-Kit Lee

Min-Chie Jeng

Ke-Wei Su

Chung-Kai Lin

Cheng Yuan Hsiao

Yi-Shun Huang

Ya-Chin Liang

Li-Chung Hsu

Juan Yi Chen

Ting-Sheng Huang

Juan-Yi Chen

A method for establishing an aging model of a device is provided. The device is measured to obtain degradation information of the device under an operating condition, wherein the device is a physical device. The degradation information is partitioned into a permanent degradation portion and an impermanent degradation portion. The impermanent degradation portion is differentiated by time to obtain a differential value. The aging model is obtained according to the differential value. When the differential value is greater than zero, a degradation of the device increases over time, and when the differential value is less than zero, the degradation of the device decreases over time.

Method for establishing aging model of device and analyzing aging state of device with aging model

A method includes receiving input information related to devices of an integrated circuit. A first simulation of the integrated circuit is performed over a first time period. Average temperature changes of the devices over the first time period are calculated. A second simulation of the integrated circuit is performed over a second time period using the average temperature changes of the devices. The first simulation and the second simulation are executed by a processor unit.

Simulation scheme including self heating effect

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Hong Kong, China

Wai-Kit Lee