Air Products and Chemicals, Inc.

Versum Materials Us, LLC

Wade Hampton Bailey, Iii

Sergei Vladimirovich Ivanov

William Jack Casteel, Jr

Xinjian Lei

Daniel P Spence

John Anthony Thomas Norman

Melanie K Perez

Gauri Sankar Lal

David A Roberts

Guido Peter Pez

Charles Michael Birtcher

Moo-Sung Kim

Thomas Andrew Steidl

William Franklin Burgoyne, Jr

Robert George Syvret

Reno Pesaresi

Xukun Luo

Michael Ulman

Krishnakumar Jambunathan

James Patrick Nehlsen

Reno Joseph Pesaresi, Jr

Frank Michael Prozonic

Kai Kang

Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.

Delivery container with flow distributor

The disclosure relates to new compositions comprising an, BFHanion that may be prepared chemically or electrochemically by oxidation of BFHsalts. This anion can be generated electrochemically in a voltammetry experiment, or by chemically by treatment of the (2&#x2212;) anions with powerful oxidants such as XeF2 or NO2(+) salts. The new compositions can be used as 1 electron chemical oxidants and in electrochemical cells such as lithium ion batteries where their formation at elevated potential can serve to limit the upper limit of voltage during the overcharge of such a cell.

Dodecaborate salt radical anion compositions and methods for making and using such compositions

Metal imidazolate complexes are described where imidazoles ligands functionalized with bulky groups and their anionic counterpart, i.e., imidazolates are described. Compounds comprising one or more such polyalkylated imidazolate anions coordinated to a metal or more than one metal, selected from the group consisting of alkali metals, transition metals, lanthanide metals, actinide metals, main group metals, including the chalcogenides, are contemplated. Alternatively, multiple different imidazole anions, in addition to other different anions, can be coordinated to metals to make new complexes. The synthesis of novel compounds and their use to form thin metal containing films is also contemplated.

Complexes of imidazole ligands

Metal-containing complexes with general formula (1) (RPyr)(RPyr)MLL; or (2) [(RXR)(RPyr)(RPyr)]MLLare disclosed; wherein M is a Group IV metal, Pyr is pyrrolyl ligand, n=1, 2 and 3, Land Lare independently selected from alkoxide, amide or alkyl, Land Lcan be linked together, Rand Rcan be same or different organic groups substituted at 2,3,4-positions of the pyrrole ring and are selected from the group consisting of linear and branched Calkyls, Rand Rare independently selected from the linear or branched chain alkylene group having 2-6 carbon atoms, and X is CHor oxygen. Methods of using the metal complexes as precursors to deposit metal or metal oxide films used for various devices in semi-conductor industries are also discussed.

Group IV metal complexes for metal-containing film deposition

Volatile metal amidate metal complexes are exemplified by bis(N-(tert-butyl)ethylamidate)bis(ethylmethylamido) titanium; (N-(tert-butyl)(tert-butyl)amidate)tris(ethylmethylamido) titanium; bis(N-(tert-butyl)(tert-butyl)amidate)bis(dimethylamido) titanium and (N-(tert-butyl)(tert-butyl)amidate)tris(dimethylamido) titanium. The term 'volatile' refers to any precursor of this invention having vapor pressure above 0.5 torr at temperature less than 200&#xb0; C. Metal-containing film depositions using these metal amidate ligands are also described.

Amidate precursors for depositing metal containing films

The present invention relates to lithium secondary batteries comprising a negative electrode, a positive electrode, a separator and a lithium-based electrolyte carried in an aprotic solvent, and to the electrolyte compositions, and to methods for purifying battery active materials. The electrolyte comprises at least one solvent and a lithium salt of the formula:LiBFHZwhere x+y is from 3 to 12, and x and y are independently from 0 to 12, and Z comprises at least one of Cl and Br.

Process for the purification of lithium salts

A compound having the structure: w-A-x-CY&#x2014;Z(CF), where CY is cyclohexane or substituted cyclohexane, exemplified by 4-trifluoromethyl-4-methylcarboxy-4'-propyl-1,1&#x2032;-(bi)cyclohexane.

Quaternary trifluoromethylcyclohexane derivatives for liquid crystals

The present invention relates to lithium secondary batteries comprising a negative electrode, a positive electrode, a separator and a lithium-based electrolyte carried in an aprotic solvent, and to the electrolyte compositions. The electrolyte comprises a lithium salt of the formula:LiBFHZwhere x+y is from 3 to 12, and x and y are independently from 0 to 12, and Z comprises at least one of Cl and Br.

High purity lithium polyhalogenated boron cluster salts useful in lithium batteries

A process for fluorination of borohydride salts including providing a reaction medium comprising HF and a superacid. A borohydride salt compound is added to the reaction medium. The borohydride salt is reacted with the reaction medium under conditions to form a fluorinated borohydride salt. In addition, reactor vessels may be provided for reacting the HF, superacid additive and borohydride that are fabricated from materials resistant to superacid compositions.

Process for the fluorination of boron hydrides

Novel compositions containing SF&#x2014;O&#x2014;CFbonded to an organic group are disclosed. Aryl trifluoromethoxytetrafluorosulfuranes (or Ar&#x2014;SF&#x2014;O&#x2014;CF), have been synthesized via the reaction of an aryl disulfide or thiol with fluoroxytrifluoromethane (FCOF). The compositions are useful synthons, which may be derivatized to yield highly electrically polar molecules, particularly novel liquid crystal compositions having high dielectric anisotropies. Cycloalkyl trifluoromethoxytetrafluorosulfuranes have similar utility.

Alkyl and aryl trifluoromethoxytetrafluorosulfuranes

A process is described for the synthesis of an aryl sulfur pentafluoride compound. In one embodiment of the present invention, there is provided a process for preparing an aryl sulfurpentafluoride compound comprising: combining an at least one aryl sulfur compound with a fluorinating agent to at least partially react and form an intermediate aryl sulfurtrifluoride product; and exposing the intermediate aryl sulfurtrifluoride product to the fluorinating agent and optionally a fluoride source to at least partially react and form the aryl sulfurpentafluoride compound.

Process for the synthesis of aryl sulfurpentafluorides

A process for producing BrSFincludes providing a first reactant including a metal fluoride of fluorine and a metal M selected from the group consisting of alkali metals, alkaline earth metals, and Ag, providing a second reactant including BrF, combining the first reactant and the second reactant to form a mixture, wherein the first reactant and the second reactant are allowed to contact for a period of time sufficient to produce MBrFin an amount stoichiometrically equivalent to a quantity of BrF, and providing a third reactant including SF, wherein the third reactant reacts with MBrF. The process for producing BrSFcan further include providing a fourth reactant including Br, wherein the fourth reactant is provided before, during and/or after providing the first reactant, the second reactant and/or the third reactant. BrSFis produced in a yield of from about 50% to about 99.99% based on the amount of SF.

Process for the synthesis of BrSF5

Direct fluorination process for preparing high purity 2-fluoro-1,3-dicarbonyl compounds using oxygen as a radical scavenger

A process for providing an &agr;-fluorinated-&bgr;-dicarbonyl includes electrophilically fluorinating a &bgr;-dicarbonyl with bis-fluoroxydifluoromethane in the presence of an acid to provide the &agr;-monofluorinated-&bgr;-dicarbonyl. The acid is preferably hydrofluoric acid. Preferred &bgr;-dicarbonyls include methyl-3-oxopentanoate and ethyl-4,4,4-trifluoroacetoacetate. The process can limit radical impurity byproducts to no more than 4% in some cases, and less than 0.5% in other cases. Theoretical yields of 95% &agr;-monofluorinated-&bgr;-dicarbonyl are possible in some cases.

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Emmaus, PA, United States of America

Wade Hampton Bailey, Iii