Microfab Technologies Inc.

Other

Compaq Computer Corporation, Inc.

W Royall Cox

Donald J Hayes

Ting Chen

Chi Guan

A method for forming a micro-optical switch component includes providing a semiconductor substrate having a surface. An opto-electronic device is integrated into the semiconductor substrate at a site. A pedestal of microlens material is formed on the semiconductor substrate surface at the site of the opto-electronic device. The pedestal extends from the semiconductor substrate surface and has a top surface spaced apart from the semiconductor substrate surface. A print head is provided and contains an optical fluid which is hardenable and capable of serving as a micro-optical element. The printhead includes an orifice from which micro-droplets of the optical fluid are ejected in response to control signals. Optical fluid is deposited onto the top surface of the pedestal to thereby form a micro-optical element on the pedestal.

Method for producing a fiber optic switch

Collimating microlenses are &ldquo;printed&rdquo; from optical polymeric materials on the ends of optical fibers using ink-jet technology. In one embodiment the optical fibers are inserted into a collet, a stand-off distance from the open upper end of the collet. The open upper end is filled with optical fluid and a microlens is formed thereon to collimate light exiting the fiber through the microlens. In another embodiment optical fibers from a &ldquo;ribbon&rdquo; are separated and installed into a ferrule having multiple openings therethrough. In the same manner as in the collet embodiment, the ferrule openings serve as a mold for the lens formation with the end of the fiber being located at the focal distance of the lenslet formed in an on the ferrule. A non-wetting coating can serve to control spreading of the fluid optical material and allow lens radius control as well. The microlenses are hardened after formation.

Ink-jet printing of collimating microlenses onto optical fibers

Method for producing micro-optical components

Method of forming an orifice array for an ink jet printhead. Excimer laser radiation is used to ablate an orifice array in a cover plate having a removable backing, a front side layer formed from either an ablatable inactive material such as polyimide, a non-wettable material doped to absorb excimer radiation, or an ablatable inactive material such as polyimide with a very thin surface layer of a non-wettable material, and an intermediate layer formed from an adhesive material. First, a series of generally square indentations approximately 80 .mu.m on each side and which extends through the removable backing and the intermediate layer and partially through the front side layer to exposing an interior surface of the front side are formed at spaced locations along the back side surface of the cover plate. Next, a corresponding series of generally circular apertures approximately 40 .mu.m in diameter, each positioned in the general center of the corresponding indentation and extending through the front side layer are formed in the cover plate.

Growing community of inventors

Plano, TX, United States of America

W Royall Cox