Other

Vyril A Monk

Diwakar Garg

Carl F Mueller

A substantially compressive stress-free, pin-holes free, and defects free continuous polycrystalline diamond membrane for an x-ray lithography mask is produced by placing a prepared substrate into a hot filament chemical vapor deposition reaction chamber, pre-heating the substrate to 400.degree. C.-650.degree. C. in the presence of an inert gas, heating the substrate to 650.degree. C.-700.degree. C. in the presence of hydrogen and carbon compounds, and chemically vapor depositing a polycrystalline diamond membrane onto the substrate.

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Macungie, PA, United States of America

Vyril A Monk