Entegris, Inc.

Volkmar Thom

Philip M Goddard

Wayne T Kelly

Donald Grant

The present invention teaches, that the removal of particles of any charge from liquid stream is possible by mechanisms other than sieving with good flow and low pressure drop. The use of a weakly charged or neutral surface on the one or more filters within a pre-selected pH range is used. Consequently, particles that are much smaller than the filter pore size are captured with high efficiency. The essentially neutral or weakly charged material filter surface in the filtration liquid may be formed through the proper selection of filter material or a surface modification of the base filters(s) to create the essentially neutral or weakly charged surface.

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Chelmsford, MA, United States of America

Volkmar Thom