Robert Boschgmbh

Volker Wingsch

Ralf Henn

Joachim Gluck

Andr&eacute; Kretschmann

A method for registering a plurality of substrates that are retained on a workpiece carrier onto an exposure mask for carrying out a photolithography process has the steps of registering and immobilizing the exposure mask onto an alignment panel having precisely fitting passthrough orifices for reception of one substrate for each passthrough orifice and inserting into the passthrough orifices of the alignment panel the substrates that are retained on the workpiece carrier.

Exposure mask device and method for orienting a plurality of substrates on an exposure mask

A high-pressure sensor includes a deformation member and connection piece that is joined to the deformation member by a welded seal. The deformation member has a truncated-cone-shaped circumferential segment, via which a welding current can be supplied, in order to weld the two pieces to each other in response to a simultaneous pressing together of deformation member and pressure connection piece. A welding electrode that is configured in a cup shape having a spring-loaded nonconductive insert that can be axially displaced in the interior of the cup.

High-pressure sensor, method and tool for its manufacture

A manufacturing method for a thin-layer component, in particular a thin-layer high-pressure sensor, having a substrate on which the at least one functional layer to be patterned is to be deposited in the steps, preparing the substrate; depositing the functional layer on the substrate; and patterning the functional layer via a laser processing step, the laser processing step being selective with respect to the substrate.

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Reutlingen, Germany

Volker Wingsch