Infineon Technologies Ag

Siemens Aktiengesellschaft

Volker Weinrich

Walter Hartner

Manfred Engelhardt

G&uuml;nther Schindler

Frank S Hintermaier

Hermann Wendt

Carlos Mazure-Espejo

Igor Kasko

Matthias Kr&ouml;nke

Gerhard Beitel

Werner Pamler

Guenther Schindler

Mattias Ahlstedt

Franz Kreupl

Nicolas Nagel

Rainer Bruchhaus

Gerhard Enders

Thomas Mikolajick

Till Schl&ouml;sser

Christine Dehm

Thomas B&ouml;hm

Zvonimir Gabric

Joachim Hoepfner

Armin Kohlhase

Rainer Florian Schnabel

Gunther Schindler

Barbara Hasler

Ihar Kasko

Andreas Rusch

Manfred Hain

Marcus Kastner

Günther Schindler

Yoichi Otani

Michael R&ouml;hner

Elke Fritsch

Andreas Hauser

Franz Winterauer

Manfred M&ouml;rt

Peter Bosk

Manuela Schiele

Carlos Mazur&eacute;-Espejo

Hans Cerva

The electrode configuration includes at least one structured layer. A mask is produced on the layer to be structured and the layer is dry etched. The mask is at least slightly etchable by dry etching. The mask contains a metal silicide, a metal nitride or a metal oxide.

Method of producing an electrode configuration and method of electrically contacting the electrode configuration

A ferroelectric capacitor configuration is configured with at least two different coercitive voltages. A first electrode structure having a surface which forms at least two levels is firstly produced. A layer of ferroelectric material of varying thickness is deposited over the first electrode by spin coating. A second electrode structure is subsequently formed on the layer of ferroelectric material.

Method of manufacturing a ferroelectric capacitor configuration

A method for removing structures from a substrate is described. The method includes providing a substrate that has the structures that must be removed, applying a sacrifice layer, and removing the structures and the sacrifice layer in a polishing step. The method has the advantage that the sacrifice layer surrounds the structures that must be removed and stabilizes them, so that the structures can be eroded slowly and successively in the subsequent polishing step without breaking off. This prevents a smearing of the material of the structures such as occurs given direct polishing without a sacrifice layer.

Method for removing structures

A method of fabricating semiconductor memory devices is simplified by providing at least some plug regions, which are provided for contacting storage capacitor devices of a capacitor configuration, such that the plug regions have in each case a region that is elevated above the surface region of a passivation region.

Method for fabricating a semiconductor memory device

A method for producing a ferroelectric layer includes preparing a substrate, applying a layer of material, which will be subsequently converted into the ferroelectric layer, and changing the material into the ferroelectric layer by applying an outer electrical field aligned with the direction desired in the ferroelectric material and heat treating the material. By providing a first noble metal electrode on the surface before applying the material that is to become the ferroelectric layer and then subsequently forming a second noble metal electrode on the ferroelectric layer, a ferroelectric storage capacitor can be formed. If the substrate is provided with memory cells, which include at least one transistor for each cell and the above-mentioned ferroelectric storage capacitors, a ferroelectric memory arrangement can be produced.

Method for producing a ferroelectric layer

A method for improving the adhesion between a noble metal layer and an insulation layer includes configuring a silicon layer between the noble metal layer and the insulation layer. The silicon layer is siliconized and oxidized by a thermal treatment in an oxidative environment, resulting in an oxidized silicide layer with high intermixing of the noble metal and the formed oxide. The relatively large inner surface achieved as a result improves the adhesion between the noble metal layer and the insulation layer.

Method for fabricating a component, and component having a metal layer and an insulation layer

A semiconductor memory cell is formed in a substrate and includes a capacitor, a transistor, and an electrical contact. The transistor includes a doped region which is disposed in the substrate. An insulation layer is disposed on the substrate and the transistor. The capacitor is disposed on the insulation layer and includes a bottom capacitor electrode, a capacitor insulator on the bottom capacitor electrode, and a top capacitor electrode on the capacitor insulator. The bottom capacitor electrode is conductively connected to the doped region of the transistor through the use of the contact. Because the bottom capacitor electrode is conductively connected to the doped region only after the recrystallization of the capacitor insulator, the recrystallization step does not damage the electrical contact.

Semiconductor memory cell

A method for structuring ferroelectric layers on semiconductor substrates retains or regenerates the adherence and breakdown voltage resistance of the ferroelectric layer, which is especially significant for producing storage capacitors in large-scale integrated FeRAM and DRAM memory components. The addition of H O or O results principally in the recovery of the electrostatic breakdown strength of the ferroelectric layer, which is of importance in particular when the ferroelectric serves as a dielectric of a storage capacitor and has to withstand electric fields of 5-10&times;10 V/m without a significant leakage current.

Method of patterning ferroelectric layers

A method for fabricating a contact hole for a semiconductor memory element. The memory element includes a silicon substrate, an intermediate dielectric layer on the substrate, and an upper layer on the intermediate dielectric layer. The method includes forming a perforated mask on the upper layer, the mask including a material that exhibits temperature stability. The upper layer and a depression are etched into the intermediate dielectric layer as far as a residual thickness using the perforated mask. A layer including O /TEOS-SiO is deposited onto a structure thus obtained. The layer including O /TEOS-SiO is removed from a bottom of the depression by etching. The depression is lowered by etching to produce the contact hole as far as an interface with the silicon substrate, the silicon substrate being uncovered, and the layer including O /TEOS-SiO serving as a lateral seal of the upper layer during the lowering of the depression.

Method for producing a semiconductor memory element

A method is described for producing a conducting connection through insulating layers by way of a contact hole and conducting materials with which the contact hole is filled. The method permits the production of a contact hole resembling the shape of a wineglass, into which conducting filling material and barrier layers can be inserted without the known problems such as void formation, overetching trenches, and dielectric close-off. It is possible in this way, for example, to produce an electric connection between the diffusion zone of a selection transistor and the lower electrode of a storage capacitor of large-scale integrated DRAM and FeRAM components with the aid of only a few mask steps.

Method for producing an electrically conducting connection

A cleaning process for cleaning CVD units is disclosed. In the cleaning process, alkaline earth metal and/or metal-containing process residues, which form an amorphous film on reactor walls, are removed using a dry etching medium containing free diketones at a greatly reduced pressure and an elevated temperature. In the process, the free diketones react with the alkaline earth metals or metals to form volatile complexes.

Process for cleaning CVD units

A method for fabricating a capacitor configuration in particular an FeRAM memory device includes the step of filling intermediate regions, which remain free after the formation of a capacitor device on a surface of a substrate, with at least one electrically insulating intermediate layer. The at least one electrically insulating intermediate layer is filled at least up to a level of a topmost layer of the capacitor device.

Method for fabricating a capacitor configuration

A method of fabricating semiconductor circuits having integrated capacitors that have a dielectric or a ferroelectric material between electrodes. The materials are subjected to heat treatment at high temperatures in an oxygen atmosphere for the purpose of crystallization. The dielectric or ferroelectric is heated separately from the semiconductor substrate, is comminuted into small particles and only afterward applied in this form to the semiconductor substrate. This makes it possible to integrate substances with arbitrarily high crystallization temperature without damaging the integrated semiconductor circuit, since the semiconductor substrate itself does not have to be heated. Diffusion barriers for oxygen are unnecessary. Previous limitations on the capacitor capacitance are obviated owing to the free choice of dielectric or ferroelectric made possible, and the packing density of the capacitors is increased.

Method for fabricating an integrated semiconductor circuit having a strongly polarizable dielectric or ferroelectric

The integrated ferroelectric semiconductor memory is fabricated according to the stack cell principle. A ferroelectric capacitor module is formed on an intermediate oxide above a selection transistor located in or on a semiconductor wafer. The capacitor module is brought into conductive contact by its bottom capacitor electrode with an electrode of the selection transistor by means of an electrically conductive plug leading through the intermediate oxide. A layer system of a conductive oxygen diffusion barrier and a conductive adhesion layer is deposited directly below the bottom capacitor electrode, and the adhesion layer and the overlying oxygen diffusion barrier are deposited directly into the contact hole and form the plug at least in the region lying directly below the bottom capacitor electrode.

Method for fabricating an integrated ferroelectric semiconductor memory and integrated ferroelectric semiconductor memory

A metal-containing layer is formed on a substrate. A mask layer is formed on the metal-containing layer. The mask layer is patterned by way of a lithographically fabricated mask. The metal-containing layer is patterned with the patterned mask layer, to thereby form an electrode out of the metal-containing layer. A protective layer is deposited on the mask layer and on the substrate. The protective layer undergoes chemical mechanical polishing, during which the protective layer is removed and the electrode is uncovered.

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Paris, France

Volker Weinrich