Berliner Glas Kgaa Herbert Kubatz Gmbh & Co.

Sirona Dental Systems Gmbh

Raytek Gmbh

Raytek Sensorik Gmbh

Dentsply Sirona Inc.

Volker Schmidt

Axel Schwotzer

Ulrich Kienitz

Hans-Jurgen Rostalski

William Menchine

Frank Wyrowski

Uwe Klonowski

Ralf Hammer

Oliver Baldus

Carsten Pampuch

Gregor Hasper

Mike Fischer

Khaldoun Halalo

Thomas Heinke

Gerald Burkert

Holger Sandring

Peter Preuss

A method for processing a holding plate () of a clamping device (in particular clamp wafer chuck) for holding a component, in particular a wafer, wherein the holding plate () has a SiC-based surface () on which at least one protruding, SiC-based surface element () is formed, includes the steps of locally limited heating of the holding plate () in a predetermined surface section and creating the surface element () at the predetermined surface section by chemical vapor deposition, in particular by means of laser CVD. Applications of the method exist in repairing a holding plate () of a clamping device or manufacturing a holding plate () of a clamping device. Furthermore, a holding plate of a clamping device for holding a component, in particular a wafer, is described.

Method for processing a holding plate, in particular for a clamp for holding a wafer

A 3-D camera for obtaining an image of at least one surface of at least one object. The camera comprises a light source, arranged to illuminate the object, wherein a light beam emitted from the light source defines a projection optical path. The camera also includes at least one first aperture having a first predetermined size, interposed in the projection optical path such that the light beam passes through it. An image sensor receives light back-scattered by the object, the back-scattered light defining an observation optical path. At least one second aperture having a second predetermined size, is interposed in the observation optical path such that the back-scattered light passes through it. In one example embodiment of the invention, the first predetermined size is greater than the second predetermined size, and at least one optic is arranged in both the projection and observation optical paths.

Camera for recording surface structures, such as for dental purposes

A carrier structure (), particularly for optical components, includes a carrier body () which is formed from ceramic with hollows (), and at least one cover layer () which is formed from glass, arranged on at least one surface of the carrier body (), and is connected to the carrier body () by means of at least one bond connection () produced by means of anodic bonding. Methods for producing the carrier structure () and the use of the carrier structure as a mirror body, carrier for optical components and/or mechanical carrier for dynamically moved components are also described.

Lightweight carrier structure, particularly for optical components, and method for its production

In a method for solid body joining of a carrier body () and a cover layer (), in particular by anodic bonding, the cover layer () is pressed with a pressing force against a curved carrier body surface (), wherein the pressing force during the solid body joining is distributed by way of a pressure intermediary device () areally and simultaneously over the whole cover layer () and is directed perpendicularly to the curvature of the carrier body surface (). A composite component comprising a carrier body () and a cover layer () is also disclosed, wherein a curved areal joining region () is formed between a cover layer surface () and a carrier body surface ().

Solid body joining of a carrier body and a cover layer, particularly by anodic bonding

A 3D dental camera for recording surface structures of an object by means of triangulation. The camera includes a light source for producing an illumination beam, means for focusing the illumination beam onto the surface of the object, an image sensor for recording a monitoring beam that is the illumination beam reflected by the surface of the object, and means for focusing the monitoring beam onto the image sensor. The light source is subdivided into a plurality of regions that can be independently regulated in terms of light intensity, such that a light center of the illumination beam changes in at least two switching modes of the light source.

3D dental camera for recording surface structures of an object measured by means of triangulation

The invention relates to an objective () and to a method for designing said objective () for a dental camera (), the objective () comprising at least two lenses () and the dental camera () comprising a light source () and an image sensor (). An illuminating beam emitted by the light source () is focused by the objective (), imaged on an object () to be measured, and reflected by the object () to be measured to form a monitoring beam (). The monitoring beam () passes through the objective () and is directed toward the image sensor (), the illuminating beam () being partially reflected by surfaces (&#x2033;) of the lenses () to form reflected beams (to). The objective () comprises means () for tilting each lens () relatively to the illuminating beam () such that the optical axis () of each lens () forms an angle of tilt (&#x3b1;,&#x3b2;) with the illuminating beam (), the size of said angle being such that the reflected beams (to) can be reflected in a direction away from the pupil of the monitoring beam ().

Objective for a dental camera and method for creating an image

A triangulation camera device includes a light source device being adapted for generating illumination light to be directed onto an object under investigation and including a light source with an optical pattern generator and a first aperture being arranged along a first optical axis, a detector device being adapted for sensing reflection light reflected by the object and including a detector camera and a second aperture being arranged along a second optical axis, and an imaging optic having imaging lenses being adapted for imaging the illumination light onto the object and for collecting the reflection light, said imaging optic having a third optical axis, wherein the first, second and third optical axes are arranged in parallel and displaced relative to each other and the first and second apertures are arranged with a telecentric configuration relative to the imaging optic such that the illumination light and the reflection light are capable of forming a parallel illumination light bundle and a parallel reflection light bundle, resp., on the object side of the imaging optic, said illumination light bundle and said reflection light bundle having a predetermined projection angle, and the imaging lenses are tilted relative to the third optical axis such that surface reflections of the imaging lenses are directed toward ranges outside the second aperture.

Triangulation camera device and triangulation imaging method

A device for temperature measurement uses an optical system to image the heat radiation emanating from a measurement spot on an object of measurement onto a detector. A sighting arrangement is also provided which has a diffractive optical system by which a light intensity distribution is produced which corresponds to the position and size of the measurement spot on the object of measurement.

Temperature-measurement device with diffractive optics

The invention relates to a device for temperature measurement. The heat radiation emanating from a measurement spot on an object of measurement is imaged by an optical system onto a detector. A sighting arrangement is also provided which has a diffractive optical system by which a light intensity distribution is produced which corresponds to the position and size of the measurement spot on the object of measurement.

Device for temperature measurement

Device for contactless temperature measurement of an object with an optical system which images into the finite and a detector, wherein an image of the detector is imaged by the optical system along an optical axis onto a measurement spot on the object in such a way that the image of the detector reduces from the optical system to a sharp point measurement spot and then enlarges, and also with a sighting arrangement which identifies the outer limit of the measurement spot by means of visible sighting rays. Each sighting ray is aligned obliquely with respect to the optical axis in such a way that each sighting ray can be used both before and also after the sharp point measurement spot to identify the measurement spot.

Device for measuring temperature without contact

An IR temperature sensor comprises a sealed housing containing an inert gas atmosphere and enclosing a detector for conversion of heat radiation into an electrical signal, an optical system which images the heat radiation emanating from an object onto the detector, a heat-conducting temperature equalization element which maintains the detector and the optical system at a common temperature, and a temperature sensor which measures the temperature of the temperature equalization element. The sealed housing protects the sensor from the external environment and maintains uniform temperature between the optical system and the sensor.

IR temperature sensor

A pyrometer for measuring the electromagnetic radiation emitted by an object comprises a first detector to which the radiation is delivered through an optical system as well as a second detector to which the radiation emanating from a reference element is delivered through the same optical system. The temperature of the reference element is monitored and a rotary optical modulator periodically enables and disables the delivery of radiation to the detectors. The output signals from the two detectors are processed to determine the difference therebetween. The sensed temperature of the reference element is taken into account as a part of determining the difference between the two detector output signals. In this way it is possible for the characteristic radiation of the optical system largely to be suppressed. The optical modulator comprises a semi-circular disk having a polyethylene terephthalate substrate coated on each side with metal. The disk is rotated through 180.degree. increments by a stepping motor such that, in one angular position, the disk permits reception by the two detectors of radiation from the optical system and, in the other angular position, the disk prevents reception by the detectors of radiation from the optical system.

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Berlin, Germany

Volker Schmidt