Jenoptik Aktiengesellschaft

Jenoptik Technologie Gmbh

Volker Schlehahn

Werner Scheler

Klaus Schultz

Peter Fabian

Hans-Joachim Weske

An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging side, by means of an all-purpose indexing, wherein it is possible to differentiate between various standardized magazine and wafer formats. The magazine shelves and the wafer-shaped objects are detected by an optoelectronic sensor arrangement, at least a portion of which is designed as a distance measuring system. The indexer is applicable in the manufacture of integrated circuits, in particular, for handling wafer-shaped objects in the form of semiconductors and masks.

Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein

The object of a charging device for semiconductor processing installations is to increase the flexibility of the charging process while excluding negative influences on dependability and clean room conditions. At least in a portion of the movement of a linearly movable part which is supported by a stationary part of a drive for transferring a transport object between two end positions, a gripper for the transport object being attached to the movable part, a rotating movement of the gripper is combined with the linear movement. The device is provided in particular for use in the fabrication of semiconductors.

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Jena, Germany

Volker Schlehahn