Robert Bosch

Leland Stanford Junior University

Volker Materna

Markus Lutz

Aaron Partridge

Gary Yama

Wilhelm Frey

Zhiyu Pan

Sebastian Guenther

Robert N Candler

Nicolaus Ulbrich

A sensor for detecting electromagnetic radiation, having a detection element; and at least one electrode; the detection element and the at least one electrode forming a variable capacitor, and a change in the capacitance of the capacitor being caused by the detected electromagnetic radiation.

Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same

There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for example, 2 or 4 resonators) that are mechanically coupled to provide, for example, a differential signal output. In one embodiment, the present invention includes four commonly shaped microelectromechanical tuning fork resonators (for example, tuning fork resonators having two or more rectangular-shaped or square-shaped tines). Each resonator is mechanically coupled to another resonator of the architecture. For example, each resonator of the architecture is mechanically coupled to another one of the resonators on one side or a corner of one of the sides. In this way, all of the resonators, when induced, vibrate at the same frequency.

In-plane mechanically coupled microelectromechanical tuning fork resonators

Growing community of inventors

Boetzingen, Germany

Volker Materna