Leybold Aktiengesellschaft

Centrotherm Clean Solutions Gmbh & Xo. Kg

Ebara Germany Gmbh

Volker Kinzig

Guenter Schuetz

Hans-Guenter Stueber

Rolf Hartung

Robert Michael Hartung

Alfred Hauff

An assembly is provided for purifying toxic gases from production processes by thermal conversion in a reactor chamber and subsequent treatment of reaction products with a sorption agent in a washing device in order to bind water-soluble reaction products and to elute solid reaction products. The reactor chamber has an external wall and an internal wall, the internal wall tapering at its base in the form of a funnel at a predetermined angle. A unit for thermal treatment of toxic gases is located on the reactor chamber, sealing the top of the chamber. An inner face of the internal wall of the reactor chamber comprises a film of water flowing downwards in a uniform manner. The exterior of the internal wall is surrounded by a cloak of water. A waste gas outlet and a connection for a water circuit are located at the lower end of the tapering internal wall.

Assembly for purifying toxic gases from production processes

An evacuation system (1) with exhaust gas cleaning, consists of at least one vacuum pump unit (4) and at least one cleaning unit (10) in series as to enable the continuous flow of fluid media supplied by the vacuum pump unit (4). In order to prevent condensates in a gas connection pipe (9) and in order to decrease the surface area, the at least one vacuum pump unit (4) and the at least one cleaning unit (10) are compressed into substantially one component, and the gas connection pipe (9) which runs between the vacuum pump unit (4) and the cleaning unit (10) is run in the shortest possible path and is, as a result, kept at a temperature which is above the condensation temperature of constituents in the fluid media capable of condensation, essentially without the addition of external heat, with only the compression heat of the vacuum pump unit (4). Further, a central control unit (16) for the vacuum pump unit (4) and the cleaning unit (10) can be placed over the at least one vacuum pump unit (4). In operation, the cleaning unit (10) is operated with an input temperature of the fluid media of at least 80.degree. C., and preferably of at least 160.degree. C.

Evacuation system with exhaust gas cleaning and operating process for it

A vacuum pump includes a rotor and at least one bearing that is supplied with a lubricant and that is situated, during operation, in a negative-pressure environment. In order to extend the useful life of the bearing, it is proposed that the bearing is formed from a ceramic material.

Bearings for use in negative-pressure environments

Growing community of inventors

Geinhausen, Germany

Volker Kinzig