Carl Zeiss Oim Gmbh

Volker Huss

Rolf Beck

Klaus-Georg Knupfer

Volker Schöllkopf

Joachim Reimann

An apparatus for optically inspecting an at least partially reflecting surface of an object includes first and second transverse carriers () defining respective substantially circular segment-shaped cutouts (). The transverse carriers () are disposed at a longitudinal distance (D) from one another and the longitudinal distance (D) defines a longitudinal direction (). A plurality of longitudinal members are configured to hold the first and second transverse carriers at the longitudinal distance (D). The longitudinal members are arranged at a defined radial distance to the circular segment-shaped cutouts. A translucent diffusing screen is held in the circular segment-shaped cutouts by the transverse carriers to form a tunnel-shaped inspection space. A multiplicity of light sources are arranged outside of the tunnel-shaped inspection space behind the diffusing screen. The light sources are configured to be controlled individually or in small groups to generate variable light-dark patterns on the diffusing screen. A workpiece receptacle is configured for accommodating the object in the tunnel-shaped inspection space. At least one camera is directed into the tunnel-shaped inspection space. An evaluation and control unit is configured to control the light sources and the camera to generate various light-dark patterns on the diffusing screen and to record and evaluate a plurality of images of the object in dependence on the light-dark patterns.

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Süssen, Germany

Volker Huss