Silicon Light Machines Corporation

Phase Metrics, Inc.

Vlastimil Cejna

Clinton Carlisle

Jahja I Trisnadi

Peter C Jann

Kenneth H Womack

Wayne W Li

George A Burt, Jr

Igor Iosilevsky

An integrated device of the present invention comprises free-space optics, a bi-directional multiplexor/de-multiplexor, a diffractive light modulator, a beam splitter, an optical performance monitor, and a controller. The free-space optics collimate, transform and image optical signals including a range of component wavelength signals. The bi-directional multiplexor/de-multiplexor de-multiplexes a wavelength division multiplexed signal into the component wavelength signals and multiplexes equalized component wavelength signals into an equalized wavelength division multiplexed signal. The diffractive light modulator selectively equalizes each component wavelength signal. The beam splitter is optically coupled in free-space to the diffractive light modulator for receiving the equalized component wavelength signals and re-directing a representative portion of each of the equalized component wavelength signals. The optical performance monitor receives and detects relative power levels of each representative portion of the equalized component wavelength signals. The controller receives the detected power levels, provides feedback signals and dynamically modulates the diffractive light modulator in response thereto to maintain a desired level of each of the equalized component wavelength signals.

Diffractive light modulator-based dynamic equalizer with integrated spectral monitor

A simple yet versatile noncontact optical inspection instrument and method are described for the inspection of magnetic disk surfaces for surface defects. This instrument is capable of inspecting the disk surface at any point in the disk manufacturing process. Surface defects such as bumps, pits and scratches can be measured. Surface contaminants such as particles and stains can also be measured. The instrument is also capable of discriminating between surface defects and surface contaminants. The instrument is comprised of two identical optical sensors which are located on opposite sides of the disk. A carriage supports and translates these sensors along the disk radius while a spindle rotates the disk. Both surfaces of the disk are therefore simultaneously scanned in a spiral fashion. The sensor's illumination optics produce a monochromatic focused spot of light which is normally incident upon the disk surface. The sensor uses two collection optics channels which simultaneously detect both the specular reflected light and the diffuse scattered light produced by the disk surface. Both the angle and power of the specular reflected light are measured, while just the power of the diffuse scattered light is measured. The output signals from the sensors are processed to estimate the size of the defects and to determine the type of defect.

Apparatus and method for surface inspection by specular interferometric

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Mountain View, CA, United States of America

Vlastimil Cejna