Advanced Energy Industries, Inc.

Colorado Power Electronics, Inc.

Aes Global Holdings Pte Ltd.

Vladislav V Shilo

Milan Zarko Ilic

Geoffrey N Drummond

Kalyan N C Siddabattula

Robert Brian Huff

Robert Huff

A fault recovery method for multi-phase power converters enables delivery of reduced output power of as much as 66% of normal power in the event of a shorted power switch component. The need for redundant power converters in conventional multi-phase space power systems is reduced, if not eliminated. Fault recovery includes 1) detecting a shorted power switch fault; 2) providing short circuit current protection; 3) providing isolation of the shorted power switch; and 4) reconfiguring the remaining undamaged power switches.

Fault recovery for multi-phase power converters

A system and method for over-voltage protection is described. In one embodiment of the invention, an apparatus includes an output port configured to deliver power to a plasma chamber to ignite a plasma. The apparatus also includes a shunt switch in parallel with the output port and a processor configured to receive an indicator of an arc in the plasma. The processor is configured to close the shunt switch for a period of time to divert current away from the arc. The processor is also configured to trigger a pulse of the shunt switch to limit a voltage of an increasing voltage condition associated with the arc.

Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch

Disclosed herein are an apparatus and method for charge-mode control. An embodiment of a charge mode controller may include an analog/digital converter configured to monitor the current through a duty cycle switch and convert the current to a switch current value; an accumulator module configured to integrate the switch current value during the switching cycle and output an accumulated charge value; and a comparator module responsive to the accumulated charge value and a charge set point configured to generate a gate drive signal for the duty cycle switch that turns the duty cycle switch ON when the accumulated charge value is less than the charge set point and turns the duty cycle switch OFF when the accumulated charge value reaches the charge set point and thereby controls the duty cycle of the converter and the power supplied by the power stage.

Digital charge-mode control of a power supply

There is provided by this invention an apparatus and method of supplying to ignite a plasma wherein in the event of an arc a shunt switch is used to divert the power away from the plasma that is incorporated into an over-voltage protection circuit that controls the shunt switch to act as a boost switch when the arc is extinguished such that the stored inductor energy is used to boost the ignition voltage for reigniting the plasma if it is extinguished. When the arc is extinguished, the inductor current is diminished, and the plasma is ignited, then the switch Sis turned OFF and the inductor energy goes to the plasma and the power supply operates in its normal operating mode.

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Fort Collins, CO, United States of America

Vladislav V Shilo