Axcelis Technologies, Inc.

Vladimir Romanov

Neil J Bassom

Neil K Colvin

David P Sporleder

Joshua M Abeshaus

Michael Cristoforo

Joseph F Valinski

Pradeepa Kowrikan Subrahmnya

An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.

Hydraulic feed system for an ion source

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Danville, NH, United States of America

Vladimir Romanov