Other

Lilliputian Systems, Inc.

Vladimir Petrovsky

Tony D Flaim

Douglas J Guerrero

Harlan U Anderson

Fatih Dogan

William J James

Zachary Byars

Ramanan Ganeshananthan

Atul Verma

Michelle R Fowler

John Rule

A method of measuring the dielectric constant of a powder, including selecting a powder having an unknown first dielectric constant, selecting a liquid having a known second dielectric constant, and introducing a predetermined amount of powder into a predetermined volume of liquid to define a slurry characterized by a known volume fraction of powder. Next, the impedance spectra of the slurry is plotted over a predetermined frequency range, the measured dielectric constant data is read and the appropriate equivalent circuit for the slurry is determined. Appropriate equivalent circuit equations are applied to the measured dielectric constant data and the first dielectric constant is calculated from the appropriate equivalent circuit equations, known volume fraction of powder and measured dielectric constant data.

Method for determining the dielectric constant of particles

A composition is derived from an addition polymerizable organotitanium polymer which upon exposure to an oxygen plasma or baking in air, is converted to titanium dioxide (titania) or is converted to a mixed, titanium-containing metal oxide. The metal oxide formed in situ imparts etch-resistant action to a patterned photoresist layer. The composition may also be directly deposited and patterned into permanent metal oxide device features by a photolithographic process.

Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor

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Rolla, MO, United States of America

Vladimir Petrovsky