Semiconductor Insights Inc.

Techinsights Inc.

Mark Braverman

Vladimir Martincevic

Jason Abt

Vyacheslav Zavadsky

Edward Keyes

Vyacheslav L Zavadsky

Christopher Pawlowicz

Alexander Sorkin

Devices, systems and methods relating to a distortion-correcting imaging for collecting image-related data of a substrate are disclosed, comprising: a beam emitter for directing an emission at an intended location on the substrate, and a signal detector for determining a signal intensity value associated with the emission; wherein the signal intensity value is associated with a corrected substrate location, said corrected substrate location determined from the intended substrate location and a correction factor, said correction factor being a function of said intended substrate location.

Methods, systems and devices relating to distortion correction in imaging devices

A method of registering and vertically aligning multiply-layered images into a mosaic is described. The method comprises performing an iterative process of vertical alignment of layers into a mosaic using a series of defined alignment correspondence pairs and global registration of images in a layer using a series of defined registration correspondence points and then redefining the identified alignment correspondence pairs and/or registration correspondence points until a satisfactory result is obtained. Optionally, an initial global registration of each layer could be performed initially before commencing the alignment process. The quality of the result could be determined using a least squares error minimization or other technique.

Method of registering and aligning multiple images

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Kanata, Canada

Vladimir Martincevic