Kla-tencor Technologies Corporation

Vladimir D Federov

Akella V S Satya

Li J Song

Disclosed are mechanisms for efficiently and accurately calculating critical area. In general terms, a method of determining a critical area for a semiconductor design layout is disclosed. The critical area is utilizable to predict yield of a semiconductor device fabricated from such layout. A semiconductor design layout having a plurality of features is first provided. The features have a plurality of polygon shapes which include nonrectangular polygon shapes. Each feature shape has at least one attribute or artifact, such as a vertex or edge. A probability of fail function is calculated based on at least a distance between two feature shape attributes or artifacts. By way of example implementations, a distance between two neighboring feature edges (or vertices) or a distance between two feature edges (or vertices) of the same feature is first determined and then used to calculate the probability of fail function. In a specific aspect, the distances are first used to determine midlines between neighboring features or midlines within a same feature shape, and the midlines are then used to determine the probability of fail function. A critical area of the design layout is then determined based on the determined probability of fail function. In specific implementations, the defect type is a short type defect or an open type defect. In a preferred implementation, the features may have any suitable polygonal shape, as is typical in a design layout.

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Bellevue, WA, United States of America

Vladimir D Federov