Globalfoundries Singapore Pte. Ltd.

Vish Srinivasan

Fan Zhang

Wei Shao

Juan Boon Tan

Wei Lu

Wuping Liu

Integrated circuits and methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming a conductive plug that at least partially fills a contact seam void. The contact seam void is formed in a contact that extends through an ILD layer of dielectric material overlying a device region. A metallization layer is deposited overlying the contact.

Integrated circuits having device contacts and methods for fabricating the same

Methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes providing a semiconductor device with a metal silicide electrically coupled thereto. A contact opening exposing the metal silicide is formed to the semiconductor device. A conductive material is deposite within the contact opening to form a contact to the metal silicide while simultaneously forming a contact seam void within the contact. A self-aligned conductive material is deposited within the contact to form a conductive plug that at least partially fills the contact seam void, and a metallization layer is deposited overlying the contact.

Growing community of inventors

Singapore, Singapore

Vish Srinivasan