Applied Materials, Inc.

Vinodh Ramachandran

Chaitanya A Prasad

Danny D Wang

Abraham Palaty

Giridhar Kamesh

Daniel C Glover

Raja Murali Dhamodharan

Shainish Nellikka

Mohammad Aamir

A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger, and is recirculated. One or more shrouds directs the gas as the gas is being circulated.

Air shrouds with integrated heat exchanger

Embodiments of the present disclosure generally relate to apparatus for substrate processing, and more specifically to apparatus for rotating substrates and to uses thereof. In an embodiment, an apparatus for rotating a substrate is provided. The apparatus includes a levitatable rotor comprising a plurality of magnets embedded therein, a plurality of gas bearings positioned to levitate the levitatable rotor, and a stator magnetically coupled to the levitatable rotor, the stator for producing a rotating magnetic field. Apparatus for processing a substrate with the apparatus for rotating substrates as well as methods of use are also described.

Apparatus for rotating substrates

Growing community of inventors

Bengaluru, India

Vinodh Ramachandran