The Coleman Company, Inc.

Taiwan Semiconductor Manufacturing Comp. Ltd.

Aero Products International, Inc.

Vincent Wen

Brian Coleman

Michael F Kehrmann

Timothy F Austen

Chun Chung Tsai

Corey Lewison

Michael Prince

Tsun-Cheng Tang

Tim Austen

Jun-Hsien Chiou

Tung-Yaw Kang

Chih-Sheng Chen

An automatic deactivation mechanism is configured for an air bladder pump having a casing and a motor located therein to pump air into an air bladder from the atmosphere and through an air valve connected through the casing. The automatic deactivation mechanism includes a housing positioned within the casing and has defined therethrough a first aperture in fluid communication with the atmosphere through the casing and a second aperture in fluid communication with the air bladder through the casing. Included within the housing are at least two switches and a diaphragm positioned between the switches. The housing is sealed so that when a threshold pressure is reached therein, at least one switch is triggered by deflection of the diaphragm to automatically deactivate the pump by de-energizing the motor.

Pump with automatic deactivation mechanism

A pump for an inflatable device includes a housing that defines a blower chamber configured to be inserted into the inflatable device. The blower chamber includes an exhaust port configured to communicate air out of the pump. The housing also defines a deflation port, which is adjacent to the blower chamber, and an attachment portion configured to make a substantially airtight seal with the surface of the inflatable device. The pump also includes a removably attachable cover configured to substantially cover the blower chamber. The cover defines an opening through which the deflation port extends, and at least one vent through which air is communicated into the pump.

Pump with integrated deflation port

Inflatable chair

The present invention relates to a method of removing halos resulting from focused ion beam (FIB) repair of clear defects on reticles. The halos are formed during carbon deposition on clear defects. An exposure with 172 nm VUV radiation is used to vaporize the carbon compounds in the halo. MSM measurements of the space width adjacent to the repair site are compared to space widths between similar features in areas that are clear of halos. The radiation and measurement is repeated until the % variation between said space widths is <2%. Cleaning and MSM measurement steps are repeated until space width adjacent to the repair site is within 2% of space width in unaffected areas. This method avoids expensive rework and restores transmission through the substrate adjacent to the repair site to a value equivalent to regions of substrate unaffected by halos.

Utilizing vacuum ultraviolet (VUV) exposure to remove halos of carbon deposition in clear reticle repair

Growing community of inventors

Taipei, Taiwan

Vincent Wen