Advanced Energy Systems, Inc.

Grumman Aerospace Corporation

Vincent S Calia

Robert M Gutowski

Edwin Gerard Haas

Eric Phillip Muntz

Basil P Leftheris

Alan M Todd

John W Brook

A method for providing a lithographic light source is provided that includes producing a process fluid plume. A coaxial shielding fluid is produced around the process fluid plume. A plasma is generated by providing an energy source that impinges on the process fluid plume.

System and method for providing a lithographic light source for a semiconductor manufacturing process

An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle ( ) may include a nozzle cavity ( ) disposed within a nozzle body ( ) between an up-stream end ( ) and a down-stream end ( ). A nozzle passage ( ) may be defined within the nozzle cavity ( ) and extend a longitudinal length ( ) from the down-stream end ( ) of the nozzle body ( ) into the nozzle cavity ( ). A discharge orifice ( ) may also be defined at the down-stream end ( ) of the nozzle cavity ( ) and have an associated width ( ). The width ( ) of the discharge orifice ( ) may be substantially less than the longitudinal length ( ) of the nozzle passage ( ).

Fluid nozzle system and method in an emitted energy system for photolithography

A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and a diffuser for capturing a substantial portion of the gas so as to mitigate contamination caused thereby. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like.

Method and apparatus for producing extreme ultra-violet light for use in

An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle (22) may include a nozzle cavity (110) disposed within a nozzle body (100) between an up-stream end (102) and a down-stream end (104). A nozzle passage (118) may be defined within the nozzle cavity (110) and extend a longitudinal length (120) from the down-stream end (104) of the nozzle body (100) into the nozzle cavity (110). A discharge orifice (124) may also be defined at the down-stream end (104) of the nozzle cavity (110) and have an associated width (126). The width (126) of the discharge orifice (124) may be substantially less than the longitudinal length (120) of the nozzle passage (118).

Fluid nozzle system and method in an emitted energy system for

A method of fabricating very small diameter deep passages is provided. The method of fabricating very small diameter deep passages may include fabricating a recess (206) in a first side (202) of an article (200). An article passage (216) may be fabricated between a second side (204) of the article (200) and the recess (206). An insert (220) may be provided sized to fit the recess (206). An insert passage (230) may be fabricated in the insert (220). The insert (220) may then be secured in the recess (206), with the insert passage (230) and the article passage (216) aligned.

Method of manufacturing very small diameter deep passages

A beam of negatively charged ions is neutralized by impinging jets which dislodge elctrode electrons from the ions. Gas jets are created by orifices circumferentially located around a ring. The symmetrical radial distribution of the orifices does not create a net radial thrust on the ring, which is an important consideration in low-gravity outer space. Further, maximized gas dynamics creates a neutralized beam with a uniform gas density at the exit thereof and an optimized neutralized ion fraction, as compared with the population of ions in the introduced beam.

Orifice ring ion beam neutralizer

A method and apparatus for monitoring an electrically actuated tool. The current flowing in the tool circuit is sampled and converted to an analog voltage signal that is proportional to the maximum stress level output of the tool. This converted signal may be displayed and recorded as desired. The converted analog voltage signal is compared with signals representing the current flow that will produce the highest and lowest acceptable stress levels delivered by the tool and a logic control signal is produced if the analog voltage signal is outside the acceptable range. The logic control signal is used to prevent recycling of the tool so that subsequent tool operation is not possible until corrective procedures are instituted. Further, the logic control signal may be used to activate audio and visual indicators. Moreover, the logic control signal can be used to introduce a load into the total circuit to modify the current delivered to the tool and therefore change its output.

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Greenlawn, NY, United States of America

Vincent S Calia