Meta Platforms Technologies, LLC

Vincent Overney

Keren Zhang

Alejo Lifschitz Arribio

Anthony Phan

Various systems and methods relating to a feature fill sol-gel material are provided herein. The feature fill sol-gel material may form a superconformal sol-gel coating. The feature fill sol-gel material may include a first titanium precursor composed of Titanium(IV) and an inorganic ligand. The feature fill sol-gel material may be formed by dissolving or suspending the first titanium precursor in a solvent. The feature fill sol-gel material may be annealed to form the superconformal sol-gel coating. The superconformal sol-gel coating may be an optically transparent coating having an absorbance at a wavelength of 450 nm of less than 0.2% per 150 nm and a refractive index ranging from 1.65 to 2.20.

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Bellevue, WA, United States of America

Vincent Overney