Average Co-Inventor Count = 5.00
ph-index = 4
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (5 from 993 patents)
5 patents:
1. 10584415 - Temperature controlled showerhead
2. 10221484 - Temperature controlled showerhead
3. 9476120 - Temperature controlled showerhead
4. 8673080 - Temperature controlled showerhead
5. 8137467 - Temperature controlled showerhead