Honeywell International Inc.

Vince Speziale

Stephane Ferrasse

Frank C Alford

Scott R Sayles

Werner Hort

Harold A Detlaff

Stuart D Wright

Andrew N A Wragg

The invention includes backing plates having coolant deflectors with at least a portion of each of the deflectors being nonlinear. Projections projecting from the backing plate are configured to insert into openings within a sputtering target. The invention includes targets having at least one opening to receive a fastener extending into the target through a back surface. The invention includes a target assembly having projections projecting from the backing plate and insertable within openings within the target. The invention includes a target assembly having a plurality of coolant deflectors disposed between the target and the backing plate. A segment of each of the deflectors is nonlinear. The invention includes methods of cooling a target. Coolant deflectors are disposed within a gap between the target and a backing plate with coolant deflectors being nonlinear along at least a portion of their length.

Target assemblies, targets, backing plates, and methods of target cooling

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Mead, WA, United States of America

Vince Speziale