Average Co-Inventor Count = 3.00
ph-index = 5
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Brooks Automation Gmbh (10 from 478 patents)
10 patents:
1. 10444749 - Methods and systems for controlling a semiconductor fabrication process
2. 8972029 - Methods and systems for controlling a semiconductor fabrication process
3. 8775148 - Methods and systems for controlling a semiconductor fabrication process
4. 8639365 - Methods and systems for controlling a semiconductor fabrication process
5. 8639489 - Methods and systems for controlling a semiconductor fabrication process
6. 8612198 - Methods and systems for controlling a semiconductor fabrication process
7. 8473270 - Methods and systems for controlling a semiconductor fabrication process
8. 7945348 - Methods and systems for controlling a semiconductor fabrication process
9. 7899562 - Methods and systems for controlling a semiconductor fabrication process
10. 7769482 - Methods and systems for controlling a semiconductor fabrication process