Louisiana Tech University

Vti Technologies Oy

Ville Kaajakari

The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator in which the width of the spring elements (), (-), (-) is greater than the width of the electrode fingers (-), (-), (-), said widths specifically dimensioned so that the sensitivity of the resonant frequency change with respect to dimensional manufacturing variations d(&#x394;&#x3c9;/&#x3c9;)/d&#x3b4; approaches zero. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.

Micromechanical resonator

A DC generation and storage device including a power generation section with multiple layers of an electret film. A rectifier is connected to the electret film, which in turn will be connected to a DC to DC converter. A power storage device (e.g., a battery or capacitor) will be connected to the converter.

Growing community of inventors

Ruston, LA, United States of America

Ville Kaajakari