Murata Manufacturing Co., Ltd.

Ville Kaajakari

Toshio Nishimura

Ryota Kawai

Yoshihisa Inoue

A microelectromechanical resonator is provided with two proof masses that are coupled with an anti-phase coupling structure that includes a seesaw lever and a force-displacement lever. Moreover, a joint extends from the seesaw lever to the force-displacement lever and a mass connection element extends from each proof masse to the adjacent lever.

Double-lever coupling

A resonance device is provided that includes a resonator having a base, a vibrating arm extending from one end of the base along a first direction, a frame disposed around at least a part of the vibrating arm and holding the vibrating arm such that the vibrating arm is configured to vibrate, and a support arm connecting the base to the frame. Moreover, a first substrate is provided that includes a first recess forming at least a part of a vibration space for the resonator and a first limiting portion provided away from the support arm by a first distance in a thickness direction, in which the first distance is smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate.

Resonance device

A resonator is provided that includes a vibration member that includes a substrate, a metal layer formed along one of main surfaces of the substrate, and a piezoelectric thin film disposed between the substrate and the metal layer. The vibration member vibrates such that a main vibration is a contour vibration. Moreover, a frame surrounds at least a portion of the vibration member, and a support unit connects the vibration member to the frame. The vibration member includes depressed portions on or above the one of main surfaces where the piezoelectric thin film is removed.

Growing community of inventors

Helsinki, Finland

Ville Kaajakari