Asml Netherlands B.v.

Viktor Trogrlic

Willem Richard Pongers

Martin Jules Marie-Emile De Nivelle

Arjan Gijsbertsen

Andrey Valerievich Rogachevskiy

An apparatus for measuring a height of a substrate for processing in a lithographic apparatus is disclosed. The apparatus comprises a first sensor for sensing a height of the substrate over a first area. The apparatus also comprises a second sensor for sensing a height of the substrate over a second area. The apparatus further comprises a processor adapted to normalize first data corresponding to a signal from the first sensor with a second sensor footprint to produce a first normalized height data, and to normalize second data corresponding to a signal from the second sensor with a first sensor footprint to produce a second normalized height data. The processor is adapted to determine a correction to a measured height of the substrate based on a difference between the first and second normalized height data.

Growing community of inventors

Eindhoven, Netherlands

Viktor Trogrlic