Texas Instruments Corporation

Vikki S Simpson

Lawrence D Dyer

Jerry B Medders

Franklin L Allen

Eugene C Davis

John Britton Robbins

Mohendra S Bawa

Jerry D Smith

Tom G Gullett

Douglas W Bilderback

Palmer A Miller

Clyde A King

Danny R Newton

Kenneth John L'Anglois

Michael H Grimes

Michael Cunningham

Bobby R Robbins

Gary Lee Etheridge

Arthur R Clark

A method for maintaining the buffer capacity of a polishing slurry during chemical-mechanical wafer polishing, the method comprising circulating the polishing slurry in a chemical-mechanical wafer polishing apparatus, monitoring the pH of the polishing slurry, combining an agent into the polishing slurry to adjust the pH of the polishing slurry and maintaining the pH of the polishing slurry within a predetermined range, thereby maintaining the buffer capacity of the polishing slurry.

Method for maintaining the buffer capacity of siliceous

An edge polishing system (20, 320) and method for edge polishing semiconductor wafers is disclosed. The system (20, 320) includes a loader (22, 326), a polisher (24, 328), an unloader (26, 330), and a controller (28, 335). The method includes the steps of loading wafers (28), and spacers (30) into a loader (22) to form a stack (36), moving the stack (36) into a polisher (24) and causing polisher (24) to polish the stack (36), then moving the stack (36) to an unloader (26), which semiautomatically removes the wafers (28) and spacers (30). The system (20) may include a controller (28) for entering the appropriate commands.

Semiconductor wafer edge polishing system and method

The protection to the backside of the semiconductor wafer is accomplished by applying a layer of silicon oxide or silicon nitride or other deposited material to the back surface of a semiconductor wafer to protect against particles, scratches, and etching by mild caustic solutions. The layer remains in place during all three processes, edge pre-polish, mirror edge polish, and wafer polish.

Method of surface protection of a semiconductor wafer during polishing

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Sherman, TX, United States of America

Vikki S Simpson