Asml Netherlands B.v.

Vijay Kumar Badam

Paulus Martinus Maria Liebregts

Martinus Hendrikus Antonius Leenders

Marcus Adrianus Van De Kerkhof

Roelof Frederik De Graaf

Nina Vladimirovna Dziomkina

Martijn Houben

Gerardus Martinus Antonius De Rooij

Johanna Antoinette Maria Sondag-Huethorst

Niek Elout De Kruijf

Johannes Henricus Wilhelmus Jacobs

Marco Koert Stavenga

Richard Joseph Bruls

Youri Johannes Laurentius Maria Van Dommelen

Jan Cornelis Van Der Hoeven

Gert-Jan Gerardus Johannes Thomas Brands

Rudy Jan Maria Pellens

Marcus Johannes Van Der Zanden

Coen Cornelis Wilhelmus Verspaget

David Lucien Anstotz

Casper Roderik De Groot

Thijs Egidius Johannes Knaapen

Rudolf Adrianus Joannes Maas

Martijn Hendrik Kamphuis

A member is provided to prevent immersion liquid ingress to a gap between components or to adhere to at least one component to provide a surface to a feature of an immersion system. The member has a plastic sealing portion that is adhered to the component(s). The plastic sealing portion is opaque to DUV radiation. It may be resistant to degradation through exposure to DUV radiation. It may have a liquid phobic coating or property.

Lithographic apparatus, removable member and device manufacturing method

A lithographic apparatus having a table including a target and/or a sensor and a liquid displacing device to displace liquid from the target and/or sensor using a localized gas flow is disclosed. The liquid displacement device may be positioned at various positions, e.g. mounted to a liquid handling device at an exposure station, adjacent or in a transfer path between the exposure station and a measurement station, at a load/unload station or adjacent a sensor.

Lithographic apparatus and device manufacturing method

A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particular the time-related force-coupling, between the components being sealed.

Growing community of inventors

Eindhoven, Netherlands

Vijay Kumar Badam