Average Co-Inventor Count = 2.01
ph-index = 21
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (135 from 13,520 patents)
2. Other (2 from 832,347 patents)
3. Varian Semiconductor Equipment Associates, Inc. (1 from 916 patents)
139 patents:
1. 12424481 - Modular substrate support assembly
2. 12400896 - Fabrication of substrate support devices using inorganic dielectric bonding
3. 12347659 - Electrostatic chuck assembly for cryogenic applications
4. 12334315 - Cooled substrate support assembly for radio frequency environments
5. 12331984 - Cryogenic micro-zone electrostatic chuck connector assembly
6. 12334385 - Tunable temperature controlled substrate support assembly
7. 12243756 - Temperature controlled substrate support assembly
8. 12224198 - Electrostatic chuck with mesas
9. 12205843 - Ground electrode formed in an electrostatic chuck for a plasma processing chamber
10. 12125728 - Substrate carrier
11. 12125734 - Vacuum seal for electrostatic chuck
12. 12097665 - Porous plug bonding
13. 12061103 - Packaging design for a flow sensor and methods of manufacturing thereof
14. 12057298 - Apparatus for fiber optic temperature probe in processing chambers
15. 12033837 - Electrostatic chuck assembly for cryogenic applications